CAJ | 학술논문

根据光纤通信无源器件对光学薄膜的特殊需求，要求在光纤尾纤上镀制较复杂的波分复用滤光膜，针对光纤镀膜所存在的难点问题，利用TFCalc膜系设计软件采用解析法设计出一个初始的规整膜系，再结合梯度优化法在该规整膜系上有选择性的局部优化，并考虑镀膜设备所允许的膜层灵敏度，评估其鲁棒性和可镀制性，从而设计出满足光谱特性要求的滤光膜膜系。然后通过对德国莱宝APS1104型镀膜机进行内部结构改造并选择合适的冷镀工艺，最终采用离子源辅助沉积对所设计的膜系进行了实际镀制，获得了性能优良的光纤尾纤波分复用滤光膜。
근거광섬통신무원기건대광학박막적특수수구，요구재광섬미섬상도제교복잡적파분복용려광막，침대광섬도막소존재적난점문제，이용TFCalc막계설계연건채용해석법설계출일개초시적규정막계，재결합제도우화법재해규정막계상유선택성적국부우화，병고필도막설비소윤허적막층령민도，평고기로봉성화가도제성，종이설계출만족광보특성요구적려광막막계。연후통과대덕국래보APS1104형도막궤진행내부결구개조병선택합괄적랭도공예，최종채용리자원보조침적대소설계적막계진행료실제도제，획득료성능우량적광섬미섬파분복용려광막。
According to the especial requirement for optical coating in fiber communication passive devices, complicated wavelength division multiplexing(WDM) filter coating was demanded on optical fiber pigtail, in view of the difficulty about the coating deposition on optical fiber pigtail, an initial quarter film was given by resolution method by using TFCalc formula design software, then gradient optimization method was combined to partly optimize the initial formula, and the layer sensitivity of the formula was analysed by combining deposition equipment to assess the robustness and the deposition feasibility, then the formula of wavelength division multiplexing(WDM) filter coating on optical fiber pigtail was obtained with good spectral properties. The internal structure and deposition technology of LEYBOLD APS1104 deposition machine made in Germany was improved to deposit the designed formula by using ion assistant deposition with low temperature, the wavelength division multiplexing filter coating on the optical fiber pigtail with good performance was acquired.