CAJ | 학술논문

固结磨料研磨垫的磨粒粒径是影响其加工效率和表面质量,以及下阶段抛光过程的重要因素。使用5μm、14μm和30μm三种粒径的金刚石固结磨料研磨垫加工石英玻璃,分析磨粒粒径对工件表面质量、材料去除率、声发射信号、摩擦系数和磨屑的影响,并结合磨粒切深选择最佳磨粒粒径。结果表明：随着磨粒粒径增大,材料去除率和表面粗糙度值均增大,声发射信号的均值和振幅显著提高,摩擦系数到达稳定水平需要的时间延长。14μm粒径磨粒的切深分布接近石英玻璃的脆塑转变临界切深201.2nm。选用粒径14μm的金刚石固结磨料研磨垫加工石英玻璃,其材料去除率为5.65μm/min,石英玻璃的表面粗糙度值Ra为66.8nm,满足硬脆材料的高效、高质量研磨要求。
고결마료연마점적마립립경시영향기가공효솔화표면질량,이급하계단포광과정적중요인소。사용5μm、14μm화30μm삼충립경적금강석고결마료연마점가공석영파리,분석마립립경대공건표면질량、재료거제솔、성발사신호、마찰계수화마설적영향,병결합마립절심선택최가마립립경。결과표명：수착마립립경증대,재료거제솔화표면조조도치균증대,성발사신호적균치화진폭현저제고,마찰계수도체은정수평수요적시간연장。14μm립경마립적절심분포접근석영파리적취소전변림계절심201.2nm。선용립경14μm적금강석고결마료연마점가공석영파리,기재료거제솔위5.65μm/min,석영파리적표면조조도치Ra위66.8nm,만족경취재료적고효、고질량연마요구。
Particle size of fixed abrasive lapping is an important factor which influences the process efficiency,surface quality and even subsequent polishing process.Three diamond fixed abrasive pads (FAP) with different particle size,namely 5 μm,14 μm and 30 μm,were used to lap quartz glass. Surface quality,material removal rate(MRR),acoustic emission signal,coefficient of friction (COF) and wear debris were investigated.Combined with abrasive cutting analysis,the optimal particle size was selected.The results showed that with the increase of particle size,MRRand Ra increased and the mean and amplitude of the acoustic emission signal magnified significantly,while the time required to reach a stable COF level rose.The cutting depth distribution of 14 μm diamond FAP came close to 201.2 nm,critical depth of brittle-ductile transition of quartz glass.Lapping quartz glass with 14 μm diamond FAP could meet the requirements of high efficient and high quality for hard and brittle material.The MRR was 5.65 μm/min with Ra 66.8 nm.