CAJ | 학술논문

为了研究准确性和效率更高的膜层光学薄膜参数测量方法，对优化膜系结构和改进制备工艺都有重要的指导作用。论文在研究传统测量方法基础上，将包络线法与全光谱拟合反演法相结合，提出了一种新型的光学薄膜参数测量方法。该方法将采用包络线法计算的单层膜光学薄膜参数近似值作为参考，设置全光谱拟合反演法优化搜索的上下限，结合适当的评价函数构建计算物理模型，并选用综合优化算法求解获得待测膜系各膜层的光学薄膜参数。最后设计 TiO2、SiO2单层膜和膜系为：G|0.5HLHL0.5H|A(H- TiO2，L- SiO2)的多层膜进行测量验证，并分析了该测量方法的效率、准确度、稳定性等。
위료연구준학성화효솔경고적막층광학박막삼수측량방법，대우화막계결구화개진제비공예도유중요적지도작용。논문재연구전통측량방법기출상，장포락선법여전광보의합반연법상결합，제출료일충신형적광학박막삼수측량방법。해방법장채용포락선법계산적단층막광학박막삼수근사치작위삼고，설치전광보의합반연법우화수색적상하한，결합괄당적평개함수구건계산물리모형，병선용종합우화산법구해획득대측막계각막층적광학박막삼수。최후설계 TiO2、SiO2단층막화막계위：G|0.5HLHL0.5H|A(H- TiO2，L- SiO2)적다층막진행측량험증，병분석료해측량방법적효솔、준학도、은정성등。
Studying more precise and efficient measuring-method for determining optical parameters of thin films plays a guiding role in improving design and optimizing preparation process of optical thin films. Several traditional measuring-methods were introduced briefly in this paper, and a new measuring-method was deduced combined envelope with the full spectrum inversion method fitting. In this method, optical parameters of a single layer were calculated approximately with envelope method, and according to the results, the upper and lower limits of the optical parameters were estimated for the full spectrum inversion method fitting firstly. Then, the physical model of the new method was established. After that, the optical parameters of thin films were solved by choosing a comprehensive optimization algorithm. Finally, the validity of the new method was validated through measuring of TiO2、SiO2 single-layer and G|0.5HLHL0.5H|A (H- TiO2,L- SiO2) multilayer. Besides, the measurement accuracy, efficiency and stability of the new method were also analyzed.