CAJ | 학술논문

在太赫兹频段，折叠波导慢波结构主要采用微细加工技术完成。讨论了目前折叠波导慢波结构主要的微加工工艺，分析了主要工艺误差包括波导深度、侧壁垂直度对0.41 THz 折叠波导慢波结构高频特性的影响。通过分析比较，a值对折叠波导行波管性能影响很大，需要在工艺中精确控制。在侧壁垂直度为89°范围以内，侧壁垂直度的变化对折叠波导行波管性能影响不大。通过仿真分析，确定了工艺中必须控制加工精确度的工艺步骤，这对0.41 THz 折叠波导行波管的研制有非常重要的意义。
재태혁자빈단，절첩파도만파결구주요채용미세가공기술완성。토론료목전절첩파도만파결구주요적미가공공예，분석료주요공예오차포괄파도심도、측벽수직도대0.41 THz 절첩파도만파결구고빈특성적영향。통과분석비교，a치대절첩파도행파관성능영향흔대，수요재공예중정학공제。재측벽수직도위89°범위이내，측벽수직도적변화대절첩파도행파관성능영향불대。통과방진분석，학정료공예중필수공제가공정학도적공예보취，저대0.41 THz 절첩파도행파관적연제유비상중요적의의。
In THz range, most of the folded waveguide slow-wave structures are fabricated by microfabrication processes. The principal microfabrication processes for fold waveguide structure nowadays are discussed. The influence of microfabrication process errors including the depth a and sidewall profile on the high frequency characteristics of 0.41 THz folded waveguide slow-wave structures are analyzed. Through the analysis, the depth a shows great influence on the performance of folded waveguide Travelling Wave Tubes(TWTs), therefore, it should be controlled accurately in the process. The sidewall profile has little effect on the performance of folded waveguide TWTs when the angle is above 89°. The key processes are determined by simulation, which is helpful for developing THz folded waveguide TWTs.