CAJ | 학술논문

微静电激励器是一种有代表性的微机电器件，为了优化该器件结构的面积，以SUGAR软件作为分析器提出采用导重法对微机电系统器件进行优化设计，与国内外采用的遗传算法等自然模拟优化算法相比，计算效率大大提高。采用遗传算法需要上万次分析，本方法仅需六七次优化迭代，几十次分析即可找到最优解。表明导重法通过计算设计变量对优化目标函数的敏度来加快优化速度，避免了自然模拟法的逐个比较的繁琐，在工程产品优化设计上值得推广。
미정전격려기시일충유대표성적미궤전기건，위료우화해기건결구적면적，이SUGAR연건작위분석기제출채용도중법대미궤전계통기건진행우화설계，여국내외채용적유전산법등자연모의우화산법상비，계산효솔대대제고。채용유전산법수요상만차분석，본방법부수륙칠차우화질대，궤십차분석즉가조도최우해。표명도중법통과계산설계변량대우화목표함수적민도래가쾌우화속도，피면료자연모의법적축개비교적번쇄，재공정산품우화설계상치득추엄。
Micro electrostatic actuator is a typical MEMS ( Micro-Electro-Mechanical Systems ) device. Guide-weight method is used for the optimization design of this MEMS device with analyzer of SUGAR software to optimize the area of the device structure. Compared with simulated nature al-gorithm such as genetic algorithm, the computing efficiency by this method is greatly increased. More than ten thousand times of analyses are required by using the genetic algorithm. The optimal solution is found by using guide-weight method within only six or seven iterations and several dozen times of analyses. Guide-weight method can accelerate the optimization speed by calculating sensi-tivity between the design variables and optimization objective function to avoid the cumbersome com-parison in simulated nature algorithm. It is worthy to popularize the guide-weight method in the engi-neering product design optimization.