CAJ | 학술논문

针对直线式时栅位移传感器的结构特点，提出了动态测量的主要误差源。采用光栅尺作为母仪，直线式时栅位移传感器空间位置为光栅的测量值，将光栅测量值与直线式时栅位移传感器的预测值进行比较，从而得到动态测量的误差值。对误差值进行数据的截断和采样、异常数据剔除，然后对误差值进行幅值谱和相位谱分析，采用误差分离和谐波修正，研制高精度的直线式时栅位移传感器。
침대직선식시책위이전감기적결구특점，제출료동태측량적주요오차원。채용광책척작위모의，직선식시책위이전감기공간위치위광책적측량치，장광책측량치여직선식시책위이전감기적예측치진행비교，종이득도동태측량적오차치。대오차치진행수거적절단화채양、이상수거척제，연후대오차치진행폭치보화상위보분석，채용오차분리화해파수정，연제고정도적직선식시책위이전감기。
Based on the structural feature of the linear time grating displacement sensor,the main source for the error of dynamic measurement is proposed.Using grating ruler as a mother,when the linear grating displacement sensor spatial location is the measured value of the grating,grating measurement and linear time grating displace-ment sensor predicted value is compared.Dynamic measurement error is obtained.The error value is to data trun-cation error and sampling,abnormal data,then the error value of amplitude spectrum and phase spectrum analy-sis,so as to the correction of error separation and harmonic correction development of high-precision linear time grating displacement sensor.