CAJ | 학술논문

纳米金刚石具有比普通金刚石更优越的性能，目前有诸多学者致力于纳米金刚石的研究。化学气相沉积法（CVD）制备纳米金刚石是近年来比较成熟的制备方法。通过简要描述纳米金刚石薄膜的生长机制，介绍了两种制备纳米金刚石薄膜的方法及其优势，讨论了两种方法在纳米金刚石的质量、尺寸及沉积速率等方面取得的最新研究进展，并对今后的主要研究方向进行了展望。
납미금강석구유비보통금강석경우월적성능，목전유제다학자치력우납미금강석적연구。화학기상침적법（CVD）제비납미금강석시근년래비교성숙적제비방법。통과간요묘술납미금강석박막적생장궤제，개소료량충제비납미금강석박막적방법급기우세，토론료량충방법재납미금강석적질량、척촌급침적속솔등방면취득적최신연구진전，병대금후적주요연구방향진행료전망。
Nanocrystalline diamond has more superior properties than normal diamond,which makes many research-ers devote themselves to it. Chemical vapor deposition(CVD)is a mature method of fabrication of nanocrystalline dia-mond. The growth mechanism of nanocrystalline diamond thin film is explained briefly in this review. Two types of fabri-cation methods and their advantages are introduced. It discussed the recent development of nanocrystalline diamond in quality,scale and growth rate with these two methods and future research from different directions.