CAJ | 학술논문

金属表面颗粒污染物是影响高功率激光系统运行环境的因素之一。为了量化高功率激光系统金属结构框架在清洗后、安装时以及工作后表面的洁净度和颗粒分布状况，需要有效地采样、测试方法及采样装置。首先介绍了粘结法和负压法及其采样装置，然后开展了相关试验研究。实验表明，粘结法、负压吸取法均可以采集到小至1μm的颗粒物，且方法操作简便，实用性强，可以满足工程的实际需要。
금속표면과립오염물시영향고공솔격광계통운행배경적인소지일。위료양화고공솔격광계통금속결구광가재청세후、안장시이급공작후표면적길정도화과립분포상황，수요유효지채양、측시방법급채양장치。수선개소료점결법화부압법급기채양장치，연후개전료상관시험연구。실험표명，점결법、부압흡취법균가이채집도소지1μm적과립물，차방법조작간편，실용성강，가이만족공정적실제수요。
The particulate contamination on metal surface is one of the factors which affect the high-power laser sys-tem operating environment.In order to quantify the cleanliness level of metal structure after cleanout,installation and work,it need efficiently sampling,testing method and sampling device .This paper firstly introduced tape sampling meth-od and microvacuum sampling method and devices,then carried out the experimental studies. Experimental results showed that two sampling methods could collected particles as small as 1μm. Moreover,the methods were simple,practi-cal,and could meet needs of practical engineering.