表面技术
錶麵技術
표면기술
SURFACE TECHNOLOGY
2015年
4期
54-59
,共6页
朱军亮%王更柱%解志文%陈添%宋晓航%高旭%于晓光%宋华
硃軍亮%王更柱%解誌文%陳添%宋曉航%高旭%于曉光%宋華
주군량%왕경주%해지문%진첨%송효항%고욱%우효광%송화
多元等离子体注入与沉积%Ti-Al-N涂层%组织结构%摩擦磨损
多元等離子體註入與沉積%Ti-Al-N塗層%組織結構%摩抆磨損
다원등리자체주입여침적%Ti-Al-N도층%조직결구%마찰마손
multi-plasma immersion ion implantation and deposition%Ti-Al-N coating%microstructure%friction and wear
目的:采用多元等离子体注入与沉积( MPIIID)技术制备Ti-Al-N涂层,系统研究涂层的微观组织结构、力学性能与摩擦学特性。方法借助XRD,XPS,SEM和TEM等,观察分析Ti-Al-N涂层的微观组织结构与物相组成,采用纳米压入试验仪、布氏硬度试验仪、摩擦磨损试验仪和激光共聚焦显微镜等测试分析Ti-Al-N涂层的力学性能、膜基结合力和摩擦磨损性能。结果 Ti-Al-N涂层表现出较高的膜-基结合强度。 Al元素掺杂诱发Ti-Al-N涂层发生严重晶格畸变。当Al原子数分数为6.18%时,Ti-Al-N涂层以c-TiAlN相结构为主,表现出超高硬度(达到39.83 GPa );随着Al 元素含量增加,涂层中的软质h-TiAlN相结构增多,硬度随之下降。摩擦试验结果表明,低Al含量Ti-Al-N涂层的抗磨损能力良好,其主要磨损机制为磨粒磨损;高Al含量Ti-Al-N涂层的抗磨损能力较差,其主要磨损机制倾向粘着磨损。结论 MPIIID技术成功实现了Ti-Al-N涂层的低温制备与成分调控,低Al含量的Ti-Al-N涂层具有优良的力学性能和优异的抗磨损能力。
目的:採用多元等離子體註入與沉積( MPIIID)技術製備Ti-Al-N塗層,繫統研究塗層的微觀組織結構、力學性能與摩抆學特性。方法藉助XRD,XPS,SEM和TEM等,觀察分析Ti-Al-N塗層的微觀組織結構與物相組成,採用納米壓入試驗儀、佈氏硬度試驗儀、摩抆磨損試驗儀和激光共聚焦顯微鏡等測試分析Ti-Al-N塗層的力學性能、膜基結閤力和摩抆磨損性能。結果 Ti-Al-N塗層錶現齣較高的膜-基結閤彊度。 Al元素摻雜誘髮Ti-Al-N塗層髮生嚴重晶格畸變。噹Al原子數分數為6.18%時,Ti-Al-N塗層以c-TiAlN相結構為主,錶現齣超高硬度(達到39.83 GPa );隨著Al 元素含量增加,塗層中的軟質h-TiAlN相結構增多,硬度隨之下降。摩抆試驗結果錶明,低Al含量Ti-Al-N塗層的抗磨損能力良好,其主要磨損機製為磨粒磨損;高Al含量Ti-Al-N塗層的抗磨損能力較差,其主要磨損機製傾嚮粘著磨損。結論 MPIIID技術成功實現瞭Ti-Al-N塗層的低溫製備與成分調控,低Al含量的Ti-Al-N塗層具有優良的力學性能和優異的抗磨損能力。
목적:채용다원등리자체주입여침적( MPIIID)기술제비Ti-Al-N도층,계통연구도층적미관조직결구、역학성능여마찰학특성。방법차조XRD,XPS,SEM화TEM등,관찰분석Ti-Al-N도층적미관조직결구여물상조성,채용납미압입시험의、포씨경도시험의、마찰마손시험의화격광공취초현미경등측시분석Ti-Al-N도층적역학성능、막기결합력화마찰마손성능。결과 Ti-Al-N도층표현출교고적막-기결합강도。 Al원소참잡유발Ti-Al-N도층발생엄중정격기변。당Al원자수분수위6.18%시,Ti-Al-N도층이c-TiAlN상결구위주,표현출초고경도(체도39.83 GPa );수착Al 원소함량증가,도층중적연질h-TiAlN상결구증다,경도수지하강。마찰시험결과표명,저Al함량Ti-Al-N도층적항마손능력량호,기주요마손궤제위마립마손;고Al함량Ti-Al-N도층적항마손능력교차,기주요마손궤제경향점착마손。결론 MPIIID기술성공실현료Ti-Al-N도층적저온제비여성분조공,저Al함량적Ti-Al-N도층구유우량적역학성능화우이적항마손능력。
ABSTRACT:Objective To investigate the microstructural, mechanical and tribological properties of the Ti-Al-N coatings synthe-sized by multi-plasma immersion ion implantation and deposition ( MPIIID) . Methods The microstructure and phase composition of the as-deposited coatings were investigated by X-ray diffraction ( XRD) , X-ray photoelectron spectroscopy ( XPS) , scanning elec-tron microscopy ( SEM) and transmission electron microscopy ( TEM) . The mechanical, bonding and tribological properties of the
<br> as-deposited coatings were investigated using nano-indentation technology, Brinell hardness tester, friction and laser scanning con-focal microscope. Results Ti-Al-N coatings showed high adhesion strength with the substrate. Al incorporation induced a serious lattice distortion. Ti-Al-N coating with an Al content of 6. 18% was mainly composed of c-TiAlN phase and possessed a super hard-ness of about 39. 83 GPa. However, the soft h-TiAlN phase in the Ti-Al-N coating increased with the increasing Al content, which led to the continuous reduction in hardness of the Ti-Al-N coatings. Tribological test results showed that the Ti-Al-N coating with a low Al content exhibited excellent wear resistance and its wear mechanisms was defined as abrasive wear. However, the Ti-Al-N coating with a high Al content exhibited poor wear resistance and its wear mechanisms was defined as adhesive wear. Conclusion The multi-plasma immersion ion implantation and deposition ( MPIIID) technique successfully realized the low temperature deposi-tion and composition control of the Ti-Al-N coatings. Ti-Al-N coating with low Al content exhibited excellent mechanical and anti-wear properties.