延边大学学报（自然科学版）
延邊大學學報（自然科學版）
연변대학학보（자연과학판）
JOURNAL OF YANBIAN UNIVERSITY(NATURAL SCIENCE EDITION)
2015年
1期
46-49
,共4页
微波等离子体化学气相沉积%金刚石薄膜%纳米针%扫描电子显微镜%Pt 薄膜
微波等離子體化學氣相沉積%金剛石薄膜%納米針%掃描電子顯微鏡%Pt 薄膜
미파등리자체화학기상침적%금강석박막%납미침%소묘전자현미경%Pt 박막
microwave plasma chemical vapor deposition%polycrystalline diamond thin films%nano-needles%scanning electron microscope%Pt thin films
利用高功率微波等离子体化学气相沉积方法在硅衬底上沉积了多晶金刚石薄膜，然后利用电子束蒸发方法在金刚石薄膜表面上沉积了5 nm 厚的 Pt 薄膜．利用 Pt 的自组织化效应，再通过氢等离子体照射、氧等离子体刻蚀、王水处理等手段，使金刚石薄膜表面形成了纳米针．利用拉曼光谱和扫描电子显微镜（SEM）表征金刚石薄膜的结构，拉曼光谱显示在1315 cm－1处出现纳米金刚石特征峰，SEM 显示纳米针均匀地直立在金刚石薄膜表面，每平方厘米大约含有108个纳米针，纳米针的平均高度约为1μm．
利用高功率微波等離子體化學氣相沉積方法在硅襯底上沉積瞭多晶金剛石薄膜，然後利用電子束蒸髮方法在金剛石薄膜錶麵上沉積瞭5 nm 厚的 Pt 薄膜．利用 Pt 的自組織化效應，再通過氫等離子體照射、氧等離子體刻蝕、王水處理等手段，使金剛石薄膜錶麵形成瞭納米針．利用拉曼光譜和掃描電子顯微鏡（SEM）錶徵金剛石薄膜的結構，拉曼光譜顯示在1315 cm－1處齣現納米金剛石特徵峰，SEM 顯示納米針均勻地直立在金剛石薄膜錶麵，每平方釐米大約含有108箇納米針，納米針的平均高度約為1μm．
이용고공솔미파등리자체화학기상침적방법재규츤저상침적료다정금강석박막，연후이용전자속증발방법재금강석박막표면상침적료5 nm 후적 Pt 박막．이용 Pt 적자조직화효응，재통과경등리자체조사、양등리자체각식、왕수처리등수단，사금강석박막표면형성료납미침．이용랍만광보화소묘전자현미경（SEM）표정금강석박막적결구，랍만광보현시재1315 cm－1처출현납미금강석특정봉，SEM 현시납미침균균지직립재금강석박막표면，매평방전미대약함유108개납미침，납미침적평균고도약위1μm．
Polycrystalline diamond thin films were deposited on silicon substrates by means of a high power microwave plasma chemical vapor deposition (CVD)method.A 5 nm Pt thin film was deposited on such dia-mond films by electron beam evaporation.Nano-needles were formed on the surface of diamond thin films by using a self-assembling process of a Pt thin film during a hydrogen-plasma exposure,an oxygen-plasma etching process,and a subsequent aqua regia treatment.The structure of the diamond film is characterized of Raman spectroscopy and scanning electron microscope (SEM),furthermore,Raman spectra suggest the existence of nano diamond characteristic peak (1 315 cm-1 ).SEM show that the nano-needles evenly upright on the dia-mond film surface,and the density was close to 108/cm2 ,the average height of nano-needles approximate 1 μm.
