激光技术
激光技術
격광기술
LASER TECHNOLOGY
2015年
3期
333-336
,共4页
刘丹%郑宾%郭华玲%刘辉
劉丹%鄭賓%郭華玲%劉輝
류단%정빈%곽화령%류휘
测量与计量%高频测相%AD8302%激光外差干涉%微振动信号
測量與計量%高頻測相%AD8302%激光外差榦涉%微振動信號
측량여계량%고빈측상%AD8302%격광외차간섭%미진동신호
measurement and metrology%high-frequency phase measurement%AD8302%laser heterodyne interference%microvibration signal
为了改善传统硬件相位测量中存在电路复杂、测量精度低、工作频带宽窄等诸多缺陷，利用AD8302的良好高频测相能力，设计了一种新的激光外差干涉信号处理系统，分析了其工作原理，并取得了静态、动态实验数据。结果表明，系统测量误差小于0．5°，使外差干涉理论测量分辨率提高到0．088nm，更有利于微振动信号的测量。
為瞭改善傳統硬件相位測量中存在電路複雜、測量精度低、工作頻帶寬窄等諸多缺陷，利用AD8302的良好高頻測相能力，設計瞭一種新的激光外差榦涉信號處理繫統，分析瞭其工作原理，併取得瞭靜態、動態實驗數據。結果錶明，繫統測量誤差小于0．5°，使外差榦涉理論測量分辨率提高到0．088nm，更有利于微振動信號的測量。
위료개선전통경건상위측량중존재전로복잡、측량정도저、공작빈대관착등제다결함，이용AD8302적량호고빈측상능력，설계료일충신적격광외차간섭신호처리계통，분석료기공작원리，병취득료정태、동태실험수거。결과표명，계통측량오차소우0．5°，사외차간섭이론측량분변솔제고도0．088nm，경유리우미진동신호적측량。
In order to overcome defects of the traditional phase measurement hardware , such as circuit complexity , low measurement precision and narrow band width , a novel signal processing system of a laser heterodyne interferometer was designed based on AD 8302 with good performance .The work theory of the system was analyzed in detail .Static and dynamic experimental data were obtained .The results show that measurement error of the system is less than 0.5°and the measurement resolution of heterodyne interference can reach 0.088nm in theory which is more conductive to measure the microvibration signal .
