CAJ | 학술논문

由于微加速度计的可靠性成为其产品商业化过程中的一个重要问题，而冲击断裂是导致其性能失效的主要原因。主要研究了压阻式微加速度计在振动环境下的可靠性问题。设计了微加速度计在振动环境下的可靠性试验并通过ANSYS进行仿真。经过分析得出微加速度计在振动环境下的主要失效模式，并进行了相应的失效机理分析。通过可靠性实验进行了验证，对微加速度计在振动环境下的可靠性进行评估，并描绘了其可靠度与失效概率曲线。
유우미가속도계적가고성성위기산품상업화과정중적일개중요문제，이충격단렬시도치기성능실효적주요원인。주요연구료압조식미가속도계재진동배경하적가고성문제。설계료미가속도계재진동배경하적가고성시험병통과ANSYS진행방진。경과분석득출미가속도계재진동배경하적주요실효모식，병진행료상응적실효궤리분석。통과가고성실험진행료험증，대미가속도계재진동배경하적가고성진행평고，병묘회료기가고도여실효개솔곡선。
The reliability of the micro-accelerometer is a key problem for its commercial application. Fracture is a main factor for the failure. Piezoresistive micro-accelerometer reliability in vibration environment is studied. The re-liability experiment is designed and simulated by ANSYS. The mechanism of these failure modes was proposed re-spectively,and were validated through experiments. Through the experiment and its results analysis the failure mechanism of micro-accelerometer is verified in the vibration environment,and the micro-accelerometer under the vibration environment is evaluated. Then,the reliability curve and failure probability curve are given.