CAJ | 학술논문

为了研制用于透射电子显微镜( TEM)的光学和电学双功能原位测试样品杆，在理解国外进口电学原位样品杆电路和电极结构的基础上，引入微型LED芯片作为发光源对其进行光电双功能升级改造，并通过优化光电双功能基片供电电源系统以保障TEM清晰成像。测试结果表明，利用自制的基片供电电源，改造后的电学测试样品杆能同时测试样品的光学和电学特性，且透射电子显微镜成像清晰稳定。
위료연제용우투사전자현미경( TEM)적광학화전학쌍공능원위측시양품간，재리해국외진구전학원위양품간전로화전겁결구적기출상，인입미형LED심편작위발광원대기진행광전쌍공능승급개조，병통과우화광전쌍공능기편공전전원계통이보장TEM청석성상。측시결과표명，이용자제적기편공전전원，개조후적전학측시양품간능동시측시양품적광학화전학특성，차투사전자현미경성상청석은정。
In order to develop a transmission electron microscope sample rod for optical and electrical dual situ-test,we upgrade an imported electrical sample rod to make it possible to simultaneously measure light-electrical characteristics of the sample by introducing pico LED chips as the light source based on the circuit design and elec-trode structure of the sample rod. And we also optimize the optical-electrical substrate power supply system to ensure the quality of TEM imaging. Test results show that the transformed sample rod works well and the image of the sample is clear and stable with the substrate power supply system.