CAJ | 학술논문

化学试剂是微电子制造工艺中清洗工艺的重要材料。由于微电子制造对化学试剂的各项要求极高，在该制造业发展初期，国内中高端生产线以进口化学试剂为主。随着国内原材料厂商工艺能力的提高，各种国产化学试剂正逐步取代进口试剂。由于微电子制造对质量的要求，化学试剂国产化需要一个较长的过程。通过国产与进口氨水及双氧水在试剂纯度、单项工艺指标及能力、使用后的产品性能等方面作对比，得到了国产试剂可以取代进口试剂的结论。
화학시제시미전자제조공예중청세공예적중요재료。유우미전자제조대화학시제적각항요구겁고，재해제조업발전초기，국내중고단생산선이진구화학시제위주。수착국내원재료엄상공예능력적제고，각충국산화학시제정축보취대진구시제。유우미전자제조대질량적요구，화학시제국산화수요일개교장적과정。통과국산여진구안수급쌍양수재시제순도、단항공예지표급능력、사용후적산품성능등방면작대비，득도료국산시제가이취대진구시제적결론。
Chemicals are important materials in microeletronic manufacture wet bench process. Foreign chemicals are widely used in high-level foundry in preliminary period as its exigent requirement. With the quality improvement of indigenous chemical suppliers, more and more domestic chemicals are in substitutional application. High level quality is required in microelectronic process, as a result, long period of time is need for domestic transformation. In the article, it is introduced two kind of solutions, Ammonia Solution and Hydrogen Peroxide. Comparisons of foreign and domestic solution are made in purities, process abilities and products usage. It comes to the conclusion that the substitution of domestic for foreign solution is available.