CAJ | 학술논문

综述了晶体硅材料中杂质元素含量测定的分析方法研究进展。晶体硅材料中杂质元素的分析方法主要包括红外吸收法、二次离子质谱法、中子活化分析法、辉光放电质谱法、电感耦合等离子体质谱法、X射线光谱分析及其它分析方法，引用文献41篇。
종술료정체규재료중잡질원소함량측정적분석방법연구진전。정체규재료중잡질원소적분석방법주요포괄홍외흡수법、이차리자질보법、중자활화분석법、휘광방전질보법、전감우합등리자체질보법、X사선광보분석급기타분석방법，인용문헌41편。
The research progress of methods for the determination of impurity elements in crystalline silicon was summarized. The analytical methods include infrared absorption method, secondary ion mass spectrometry, neutron activation analysis, glow discharge mass spectrometry, inductively coupled plasma mass spectrometry, X ray spectrum analysis and the other analytical methods. 41 references were cited in this paper.