CAJ | 학술논문

利用直流磁控溅射法，在玻璃衬底上制备掺锰氧化锌（ZnO ∶Mn）透明导电薄膜．研究了溅射功率对薄膜结构、力学性能和光电性能的影响．功率对薄膜应力影响不是很大，且应力均为负值，表现为压应力．溅射功率通过改变晶粒尺寸和结晶程度而影响薄膜的导电性能：当溅射功率为135 W 时，薄膜的电阻率具有最小值为1．10×10－2Ω·cm．实验表明，功率是影响 ZnO ∶Mn 薄膜性能的一个重要参量．
이용직류자공천사법，재파리츤저상제비참맹양화자（ZnO ∶Mn）투명도전박막．연구료천사공솔대박막결구、역학성능화광전성능적영향．공솔대박막응력영향불시흔대，차응력균위부치，표현위압응력．천사공솔통과개변정립척촌화결정정도이영향박막적도전성능：당천사공솔위135 W 시，박막적전조솔구유최소치위1．10×10－2Ω·cm．실험표명，공솔시영향 ZnO ∶Mn 박막성능적일개중요삼량．
Transparent conductive ZnO ∶Mn thin films were prepared on water -cooled glass substrate by DC magnetron sputtering.After studying the influence of sputtering power on the structure,mechanical and photoelec-tric property,it is showed that power stress is negative to be compressive stress and has no great influence on the films.The conductive property of sputtering power is shown by changing the grain size and crystallinity:the lowest resistivity of 1 .10 ×10 -2Ω·cm is obtained when the sputtering power is 135W.The experimental results show that the sputtering power is an important parameter for the property of the films.