CAJ | 학술논문

在多晶硅生产中，应用填料式氯硅烷冷凝储存设备对含氯硅烷的尾气进行回收。该冷凝储存设备可以起到一定的除杂作用，提高冷媒冷量的利用率，降低设备的制造成本，最终降低尾气中氯硅烷的回收成本。同时，还起到一定的精馏提纯作用。设备主要由冷凝器、储存罐、填料式塔板以及相应的控制系统组成，通过 DCS 控制系统实现自动控制。
재다정규생산중，응용전료식록규완냉응저존설비대함록규완적미기진행회수。해냉응저존설비가이기도일정적제잡작용，제고냉매랭량적이용솔，강저설비적제조성본，최종강저미기중록규완적회수성본。동시，환기도일정적정류제순작용。설비주요유냉응기、저존관、전료식탑판이급상응적공제계통조성，통과 DCS 공제계통실현자동공제。
In polysilicon production,packing type of chlorosilane condensate storage devices for ex-haust gas recycling containing chlorosilane applied .The condensate storage devices can play a role in remo-ving impurity,improve the utilization rate of refrigerant cooling capacity,reduce the manufacturing cost of the equipment and ultimately reduce the chlorosilane in tail gas recovery cost.At the same time,also have certain rectification column purification effect.Equipment is mainly composed of the condenser,storage tanks,packing type plate and the corresponding control system,through the DCS control system automatic control was realized.