CAJ | 학술논문

使用Q M S‐200残余气体质谱分析仪，分别以空气、空气／氩气混合气体为样品，研究了质谱仪的进样输运效应。利用空气／氩气混合气体作为标准样品，进行了质谱峰强对浓度的标定，获得了分析仪对残余空气定量分析的标定关系。研究发现：由于输运过程，注入样品由于不同成分的输运速率、排空速率不同，样品不同成分在质谱仪内的量与其原始物质的量有所不同。
사용Q M S‐200잔여기체질보분석의，분별이공기、공기／아기혼합기체위양품，연구료질보의적진양수운효응。이용공기／아기혼합기체작위표준양품，진행료질보봉강대농도적표정，획득료분석의대잔여공기정량분석적표정관계。연구발현：유우수운과정，주입양품유우불동성분적수운속솔、배공속솔불동，양품불동성분재질보의내적량여기원시물질적량유소불동。
A QMS‐200 mass spectrometry (MS) residual gas analyzer was chosen to investigate the sample relaxing process after injection . Synthetic air and air/Ar mixtures with certain ratios served as standard samples for the investigation .It was shown that MS intensities of the components did not represent the mole concentrations ,because the relaxation speeds of the components were dif‐ferent from each other due to their different transportation and evacuation rates .For quantitative com‐position analysis using the analyzer ,routine calibration was needed .By preparing air/Ar mixtures with different mole ratios as standard samples ,the relative MS intensities of the components were found proportional to the mole ratios and therefore could be scaled for quantitative analysis .