CAJ | 학술논문

微细超声工作台是微细超声加工机床与微细超声振动辅助加工机床的关键零部件，其振幅值直接影响加工精度与加工效率。传统的振幅测量方法很难准确的测出微细超声工作台的微振幅。基于精密微三维运动平台的高分辨率，提出了一种恒力控制的微振幅测量方法，成功的测量出能精确到0．1μm的微振幅。首先对微细超声工作台中的微细超声振动系统进行了理论设计，然后采用基于恒力控制的超声振幅测量方法，对不同功率作用下的微细超声振动系统的振幅值进行了测量。
미세초성공작태시미세초성가공궤상여미세초성진동보조가공궤상적관건령부건，기진폭치직접영향가공정도여가공효솔。전통적진폭측량방법흔난준학적측출미세초성공작태적미진폭。기우정밀미삼유운동평태적고분변솔，제출료일충항력공제적미진폭측량방법，성공적측량출능정학도0．1μm적미진폭。수선대미세초성공작태중적미세초성진동계통진행료이론설계，연후채용기우항력공제적초성진폭측량방법，대불동공솔작용하적미세초성진동계통적진폭치진행료측량。
The micro ultrasonic worktable is the key component of the machining tools for micro ultrasonic machining and micro ultrasonic vibration assisted machining.The vibration amplitude of the micro ultrasonic worktable has significant effect on the machining precision and processing efficiency.The traditional vibration measurement methods can hardly measure the micro amplitude of the micro ultrasonic worktable precisely.Based on the high resolution demand of the precise micro three-dimensional motion worktable,a micro amplitude measurement method controlled by constant force was presented and the micro amplitude of 0.1 μm precision has been measured successfully.The theoretical design of the micro ultrasonic vibration system in the micro ultrasonic worktable was carried out in the first section of the paper.In the second section,amplitudes of the micro ultrasonic vibration system with different power were measured by the proposed method.