CAJ | 학술논문

针对精密机械的微位移隔振问题，设计了一种以PVDF压电薄膜为作动器和传感器的新型智能隔振复合结构。根据压电方程推导出了层叠式PVDF压电薄膜作动器厚度变形量表达式，建立了该智能复合结构的隔振理论模型，采用LMS自适应控制算法，以Matlab和有限元混合建模分析方式对本智能隔振复合结构的动态特性进行研究。有限元模型的分析结果与Matlab计算数据一致，验证了本新型智能隔振复合结构对微位移隔振的有效性，其结论将为精密仪器、微纳米设备的微位移智能主动隔振奠定理论基础。
침대정밀궤계적미위이격진문제，설계료일충이PVDF압전박막위작동기화전감기적신형지능격진복합결구。근거압전방정추도출료층첩식PVDF압전박막작동기후도변형량표체식，건립료해지능복합결구적격진이론모형，채용LMS자괄응공제산법，이Matlab화유한원혼합건모분석방식대본지능격진복합결구적동태특성진행연구。유한원모형적분석결과여Matlab계산수거일치，험증료본신형지능격진복합결구대미위이격진적유효성，기결론장위정밀의기、미납미설비적미위이지능주동격진전정이론기출。
In order to isolate vibration in precise instruments,a new smart composite structure was presented here, it consisted of a PVDF piezoelectric film actuator and a sensor.The deformation formula of the multilayer PVDF piezoelectric film actuator along its thickness direction was derived according to the piezoelectric equation and the vibration isolation theoretical model of this new smart composite structure was established in detail.Adopting LMS adaptive control algorithm,the dynamic characteristics of the new smart composite structure were simulated with software Matlab and ANSYS.The simulation results of ANSYS agreed well with those of Matlab,the validity of the new smart composite structure was verified.The investigation results provided an important theoretical foundation for the micro-displacement smart active vibration isolation of precise instruments and micro-nano equipments.