表面技术
錶麵技術
표면기술
SURFACE TECHNOLOGY
2015年
5期
102-105,142
,共5页
激光薄膜%本底真空度%抗激光阀值%真空设备
激光薄膜%本底真空度%抗激光閥值%真空設備
격광박막%본저진공도%항격광벌치%진공설비
laser film%background pressure%anti-laser threshold%vacuum equipment
目的：提高真空镀膜机镀膜时薄膜的抗激光能力，研究镀膜机箱体内本底真空度和残余气体对激光薄膜光学性能的影响程度。方法借用一台较高配置的真空镀膜机，为了方便定性和定量的研究，可预先有针对性地设定不同的本底真空度，同时配合不同的残余气体等各种情况，来制备激光薄膜。通过对各种激光薄膜的检测，分别研究不同的设定条件对制备激光薄膜的具体影响。结果油汽在分压强1.6×10-3 Pa时对激光薄膜的抗激光损伤阀值最高；水汽的分压强越大，对激光薄膜的抗激光损伤阀值最小；当氧汽分压达到1.5×10-2 Pa时，抗激光损伤阀值开始急剧变小；在压强小于2.0×10-4 Pa的范围内，薄膜的抗激光损伤阀值随本底真空度的增大而增大；压强大于5.0×10-5 Pa时，薄膜的抗激光损伤阀值逐渐减小。结论提高真空设备的本底真空度，降低真空系统中残余气体的数量、成分及含量，尤其是H2 O和O2是提高激光薄膜光学性能关键。
目的：提高真空鍍膜機鍍膜時薄膜的抗激光能力，研究鍍膜機箱體內本底真空度和殘餘氣體對激光薄膜光學性能的影響程度。方法藉用一檯較高配置的真空鍍膜機，為瞭方便定性和定量的研究，可預先有針對性地設定不同的本底真空度，同時配閤不同的殘餘氣體等各種情況，來製備激光薄膜。通過對各種激光薄膜的檢測，分彆研究不同的設定條件對製備激光薄膜的具體影響。結果油汽在分壓彊1.6×10-3 Pa時對激光薄膜的抗激光損傷閥值最高；水汽的分壓彊越大，對激光薄膜的抗激光損傷閥值最小；噹氧汽分壓達到1.5×10-2 Pa時，抗激光損傷閥值開始急劇變小；在壓彊小于2.0×10-4 Pa的範圍內，薄膜的抗激光損傷閥值隨本底真空度的增大而增大；壓彊大于5.0×10-5 Pa時，薄膜的抗激光損傷閥值逐漸減小。結論提高真空設備的本底真空度，降低真空繫統中殘餘氣體的數量、成分及含量，尤其是H2 O和O2是提高激光薄膜光學性能關鍵。
목적：제고진공도막궤도막시박막적항격광능력，연구도막궤상체내본저진공도화잔여기체대격광박막광학성능적영향정도。방법차용일태교고배치적진공도막궤，위료방편정성화정량적연구，가예선유침대성지설정불동적본저진공도，동시배합불동적잔여기체등각충정황，래제비격광박막。통과대각충격광박막적검측，분별연구불동적설정조건대제비격광박막적구체영향。결과유기재분압강1.6×10-3 Pa시대격광박막적항격광손상벌치최고；수기적분압강월대，대격광박막적항격광손상벌치최소；당양기분압체도1.5×10-2 Pa시，항격광손상벌치개시급극변소；재압강소우2.0×10-4 Pa적범위내，박막적항격광손상벌치수본저진공도적증대이증대；압강대우5.0×10-5 Pa시，박막적항격광손상벌치축점감소。결론제고진공설비적본저진공도，강저진공계통중잔여기체적수량、성분급함량，우기시H2 O화O2시제고격광박막광학성능관건。
ABSTRACT:Objective To study the influence of the background pressure and the residual gas in the coating crate on optical properties of the laser film so as to improve the laser resistance of thin film when using the vacuum coating machine for coating. Methods A vacuum coating equipment was borrowed for the experiment. For the convenience to conduct qualitative and quantitative study, different background pressures were preset specifically in coordination with different residual gases and other conditions to prepare the laser film. Each kind of laser film was tested to investigate the specific influence of different setting conditions on prep-aration of laser film. Results Experimental results showed that the anti-laser damage threshold of the film was the highest when the oil and gas was at a partial pressure of 1. 6×10-3 Pa. The greater the partial pressure of water vapor was, the smaller the anti-laser damage threshold of the laser film would be. When the oxygen partial pressure reached 1. 5×10-2 Pa, the anti-laser damage thresh-old began to decrease dramatically. When the pressure was less than 2. 0×10-4 Pa, the anti-laser damage threshold of the film in-creased with the increase of the background pressure. When the pressure was greater than 5. 0 × 10-5 Pa, the anti-laser damage threshold of the film gradually decreased. Conclusion Increasing the background pressure of the vacuum equipment and reducing the amount, composition and content of residual gas in the vacuum system, especially H2 O and O2 , is the key to improve the opti-cal performance of laser film.
