CAJ | 학술논문

对场致射流微细放电加工单晶硅进行了工艺实验研究，分析在不同加工极性下的加工机理，发现在正极性加工时，蚀坑在工件表面存在电解液残留是由电火花蚀除和电化学蚀除共同作用的结果，而在充分放电的情形下，是由电火花放电来实现材料蚀除的；在负极性加工时，蚀坑仅仅是由电火花蚀除作用的结果。通过单因素实验获取喷管内径、极间距离、极间电压及工作液浓度对单次放电蚀坑直径的影响曲线，通过优化工艺参数在单晶硅表面加工出宽度为1μm、长度为5μm的微细沟槽。研究结果充分证明了场致射流微细放电加工的加工能力。
대장치사류미세방전가공단정규진행료공예실험연구，분석재불동가공겁성하적가공궤리，발현재정겁성가공시，식갱재공건표면존재전해액잔류시유전화화식제화전화학식제공동작용적결과，이재충분방전적정형하，시유전화화방전래실현재료식제적；재부겁성가공시，식갱부부시유전화화식제작용적결과。통과단인소실험획취분관내경、겁간거리、겁간전압급공작액농도대단차방전식갱직경적영향곡선，통과우화공예삼수재단정규표면가공출관도위1μm、장도위5μm적미세구조。연구결과충분증명료장치사류미세방전가공적가공능력。
The experiments of electrostatic field-induced jet micro EDM have been carried out. The mechanism of this method under different polarity machining was analyzed. The results showed that during the positive machining craters were formed by electrical discharge process and electrochemical process if electrolyte remained on workpiece ,and on the other conditions craters were formed by electrical discharge process. During the negative machining craters were formed only by electrical discharge process. The relationships between crater diameter and factors such as nozzle inner diameter , anode-to-cathode distance,voltage between two polarities and electrolyte concentration were studied respectively in detail. Through optimized parameters micro groove with 5 μm in length,1 μm in width can be machined successfully. The results showed that electrostatic field-induced jet micro EDM is a potential method in micromachining.