CAJ | 학술논문

精密长光栅作为高档数控机床中的核心部件，其制造能力和精度直接影响着数控机床的制造水平。针对纳米滚压印技术制备长光栅中的核心部件即圆柱母光栅的制造开展了深入研究，探讨了母光栅刻划用金刚石刀具的聚焦离子束(FIB)制备技术，以及微刻划过程中切削参数对圆柱母光栅加工质量的影响规律。研究发现，聚焦离子束加工单晶金刚石材料时会存在沟道效应，影响所制备的金刚石刀具及其加工母光栅的形状精度。从改善离子束束流分布的均匀性、FIB 加工参数优化等角度建立了有效克服 FIB 加工沟道效应的方法。通过 DEFORM 有限元模拟实验和超精密母光栅刻划实验，优化金刚石刀具刀尖角和微刻划加工速度，研究了抑制母光栅加工中微尺度毛刺的有效方法，最终获得了高精度母光栅刻划结果。
정밀장광책작위고당수공궤상중적핵심부건，기제조능력화정도직접영향착수공궤상적제조수평。침대납미곤압인기술제비장광책중적핵심부건즉원주모광책적제조개전료심입연구，탐토료모광책각화용금강석도구적취초리자속(FIB)제비기술，이급미각화과정중절삭삼수대원주모광책가공질량적영향규률。연구발현，취초리자속가공단정금강석재료시회존재구도효응，영향소제비적금강석도구급기가공모광책적형상정도。종개선리자속속류분포적균균성、FIB 가공삼수우화등각도건립료유효극복 FIB 가공구도효응적방법。통과 DEFORM 유한원모의실험화초정밀모광책각화실험，우화금강석도구도첨각화미각화가공속도，연구료억제모광책가공중미척도모자적유효방법，최종획득료고정도모광책각화결과。
Large-scale micro-pitch grating is the core device of high precision computer numerical control(CNC) machine tools,and its manufacture capacity and accuracy directly affects the level of manufactured CNC machine tools. In this paper,the basic research was conducted for manufacturing the cylindrical grating template which is the core device in roller nanoimprint technology. The key process in the fabrication of micro diamond tools with focused ion beam(FIB)and the impacts of chosen parameters in ultra-precision machining on the quality of cylindrical grating template were studied. It is found that the anisotropy ofdiamond material would cause channeling effect which would degrade the shape precision of both diamond tools and the template. In order to conquer the ion channeling effect,the methods for improving the ion beam homogeneity and optimizing the parameters in FIB fabrication were studiedin detail. By DEFORM finite element modeling simulation and ultra-precision machining experiments,high precision cylindrical grating template without micro-burr was achieved by optimizing the tip angle of diamond tools and ma-chining speed.