CAJ | 학술논문

为了提高微结构自由曲面光学元件超精密加工中快刀伺服系统的跟踪精度和抗干扰性，引入自抗扰控制器。通过对快刀伺服刀架进行建模分析，得到惯性环节和二阶振荡环节串联的等效模型。根据低阶自抗扰控制器控制高阶系统的理论，设计出二阶三维扩张状态观测器，可对来自各种干扰源未知扰动的观测结果做出实时估计和补偿。设计出自抗扰控制器，并给出了参数整定的规则。数字仿真实验表明：自抗扰控制器具有良好的控制品质，应用在快刀伺服系统中可以提高控制系统的跟踪性能和抗干扰性。
위료제고미결구자유곡면광학원건초정밀가공중쾌도사복계통적근종정도화항간우성，인입자항우공제기。통과대쾌도사복도가진행건모분석，득도관성배절화이계진탕배절천련적등효모형。근거저계자항우공제기공제고계계통적이론，설계출이계삼유확장상태관측기，가대래자각충간우원미지우동적관측결과주출실시고계화보상。설계출자항우공제기，병급출료삼수정정적규칙。수자방진실험표명：자항우공제기구유량호적공제품질，응용재쾌도사복계통중가이제고공제계통적근종성능화항간우성。
In order to improve tracking accuracy and robustness of fast tool servo ( FTS) system in ultra?precision machining for the microstructured freeform optics components, the active disturbance rejection control ( ADRC) was introduced. By modeling and a?nalysis for the FTS, the equivalent model of inertia link and second oscillation link in series was obtained. According to the theory of low?order ADRC controlling high?order systems, a three?dimensional and second?order state observer ( ESO) was designed. It could be used to estimate and compensate observations real?time caused by unknown disturbances from all kinds of sources, and then the ADRC controller was designed. Moreover, parameter tuning rules were given. Digital simulation results show that ADRC has good controlling quality. Its application in fast tool servo system can improve the tracking performance and robustness.