CAJ | 학술논문

针对透明导电材料领域里在廉价的普通玻璃衬底上沉积制备ZnO光电透明导电薄膜的问题，采用了新的制备方法，将玻璃基片清洗送入气相沉积反应室，向反应室内同时通入携带有Zn（ CH2 CH3）2的氩气和氧气，制备高透射率的ZnO透明导电薄膜。制备结束后在400℃高温高温环境下退火，形成性能优异的ZnO光电透明导电薄膜。该方法制备工艺简单，沉积过程易于控制，所制备的透明导电薄膜均匀性好，光电性能优异，可用于制造太阳能电池、发光二极管、LCD以及手机等光电器件的透明电极。
침대투명도전재료영역리재렴개적보통파리츤저상침적제비ZnO광전투명도전박막적문제，채용료신적제비방법，장파리기편청세송입기상침적반응실，향반응실내동시통입휴대유Zn（ CH2 CH3）2적아기화양기，제비고투사솔적ZnO투명도전박막。제비결속후재400℃고온고온배경하퇴화，형성성능우이적ZnO광전투명도전박막。해방법제비공예간단，침적과정역우공제，소제비적투명도전박막균균성호，광전성능우이，가용우제조태양능전지、발광이겁관、LCD이급수궤등광전기건적투명전겁。
In this paper,a new method was presented that was used to the deposition of ZnO transparent conductive thin film photovoltaic on cheap ordinary glass substrate in the field of transparent conductive materials. The method is to car-ry the cleaned glass substrate with the argon and oxygen accompanied with Zn(CH2CH3)2 into the vapor deposition re-action chamber to deposit the ZnO transparent conductive thin films. After the as-grown films preparation,the 400 ℃high temperature annealing is adopt to enhance the performance of high transparent conductive. The preparation process is simple and easy to control. The as-grown films with the uniformity surface and excellent optical performance can be used for the manufacture of solar cells,light emitting diodes,and transparency electrodes of LCD and mobile phones.