粉末冶金材料科学与工程
粉末冶金材料科學與工程
분말야금재료과학여공정
POWDER METALLURGY MATERIALS SCIENCE AND ENGINEERING
2015年
2期
288-295
,共8页
磁控溅射%WAlN复合膜%微结构%抗氧化%摩擦性能
磁控濺射%WAlN複閤膜%微結構%抗氧化%摩抆性能
자공천사%WAlN복합막%미결구%항양화%마찰성능
magnetron sputtering%WAlN films%microstructure%oxidation-resistance%friction properties
采用磁控溅射仪制备一系列不同Al含量的W1?xAlxN薄膜，系统研究该复合膜的微结构、力学性能、高温抗氧化性能及摩擦磨损性能。结果表明，W1?xAlxN薄膜为面心立方结构，呈(200)择优生长。当Al含量(原子分数，下同)为32.4%时，复合膜中形成h-AlN相，且随Al含量增加，h-AlN含量增多。随Al含量增加，薄膜硬度先升高后降低，Al含量为32.4%时薄膜硬度最大，约为37 GPa。随Al含量增加，复合膜在室温下的摩擦因数和磨损率均先减小后增大，Al含量为32.4%时达到最小值，分别为0.3和0.9×10?8 mm3/(N·mm)。复合膜摩擦因数随温度升高先增大后减小，而磨损率随温度升高逐渐增大，800℃下 W0.676Al0.324N 薄膜的摩擦因数和磨损率分别为0.32和8.2×10?8 mm3/(N·mm)。与W2N薄膜相比，W1?xAlxN薄膜的高温抗氧化性能和摩擦磨损性能显著提高。
採用磁控濺射儀製備一繫列不同Al含量的W1?xAlxN薄膜，繫統研究該複閤膜的微結構、力學性能、高溫抗氧化性能及摩抆磨損性能。結果錶明，W1?xAlxN薄膜為麵心立方結構，呈(200)擇優生長。噹Al含量(原子分數，下同)為32.4%時，複閤膜中形成h-AlN相，且隨Al含量增加，h-AlN含量增多。隨Al含量增加，薄膜硬度先升高後降低，Al含量為32.4%時薄膜硬度最大，約為37 GPa。隨Al含量增加，複閤膜在室溫下的摩抆因數和磨損率均先減小後增大，Al含量為32.4%時達到最小值，分彆為0.3和0.9×10?8 mm3/(N·mm)。複閤膜摩抆因數隨溫度升高先增大後減小，而磨損率隨溫度升高逐漸增大，800℃下 W0.676Al0.324N 薄膜的摩抆因數和磨損率分彆為0.32和8.2×10?8 mm3/(N·mm)。與W2N薄膜相比，W1?xAlxN薄膜的高溫抗氧化性能和摩抆磨損性能顯著提高。
채용자공천사의제비일계렬불동Al함량적W1?xAlxN박막，계통연구해복합막적미결구、역학성능、고온항양화성능급마찰마손성능。결과표명，W1?xAlxN박막위면심립방결구，정(200)택우생장。당Al함량(원자분수，하동)위32.4%시，복합막중형성h-AlN상，차수Al함량증가，h-AlN함량증다。수Al함량증가，박막경도선승고후강저，Al함량위32.4%시박막경도최대，약위37 GPa。수Al함량증가，복합막재실온하적마찰인수화마손솔균선감소후증대，Al함량위32.4%시체도최소치，분별위0.3화0.9×10?8 mm3/(N·mm)。복합막마찰인수수온도승고선증대후감소，이마손솔수온도승고축점증대，800℃하 W0.676Al0.324N 박막적마찰인수화마손솔분별위0.32화8.2×10?8 mm3/(N·mm)。여W2N박막상비，W1?xAlxN박막적고온항양화성능화마찰마손성능현저제고。
A series of W1?xAlxN films were prepared using reactive magnetron sputtering. The microstructure, mechanical properties, friction properties and oxidation-resistance were investigated by energy dispersive spectroscopy (EDS), X-ray diffraction (XRD), nano-indentation, high-temperature ball-on-disc tribo-meter, Bruker 3D profiler and annealing oven. The results indicate that the W1?xAlxN films have a fcc crystal structure with a (200) preferential orientation. As the Al atom fraction is 32.4%, the h-AlN phase appears. With increasing Al content, h-AlN content increases, the hardness first increases and then decreases, the maximum hardness is about 37GPa as the Al atom fraction is 32.4%. At room temperature, friction coefficient and wear rate of W1?xAlxN films first decrease and then increase with increasing Al content. The minimum values of friction coefficient and wear rate are 0.3 and 0.9×10?8 mm3/(N·mm) respectively when Al content is 32.4%. With increasing temperature, the friction coefficient of W0.676Al0.324N films increases and then decreases, however, the wear rate increases gradually. The friction coefficient and wear rate of W1?xAlxN composite films are 0.32 and 8.2×10?8 mm3/(N·mm) when temperature is 800℃. Compared with W2N films, the W1?xAlxN composite films have much better oxidation resistance and friction property.
