CAJ | 학술논문

采用 ZrCl4-CO2-H2-Ar 体系，在不同温度或氢气流量条件下采用常压化学气相沉积法(APCVD)通过不同沉积流程在C/C样品表面制备ZrO2涂层。用X射线衍射分析仪(XRD)和扫描电镜(SEM)分析涂层的物相组成和形貌特征。结果表明：随沉积温度升高，ZrO2涂层表面形貌由小颗粒堆积态向大尺寸多晶转变；氢气流量为0时，只在局部区域出现了少量ZrO2，当氢气流量为400 mL/min时，ZrO2涂层晶粒尺寸较大且晶体学平面特征最明显；在氢气流量为800 mL/min时沉积出现了副产物ZrC与C；在氢气流量为1600 mL/min时，出现沉积副产物ZrC；连续沉积时，得到的ZrO2涂层为山峰状形貌。
채용 ZrCl4-CO2-H2-Ar 체계，재불동온도혹경기류량조건하채용상압화학기상침적법(APCVD)통과불동침적류정재C/C양품표면제비ZrO2도층。용X사선연사분석의(XRD)화소묘전경(SEM)분석도층적물상조성화형모특정。결과표명：수침적온도승고，ZrO2도층표면형모유소과립퇴적태향대척촌다정전변；경기류량위0시，지재국부구역출현료소량ZrO2，당경기류량위400 mL/min시，ZrO2도층정립척촌교대차정체학평면특정최명현；재경기류량위800 mL/min시침적출현료부산물ZrC여C；재경기류량위1600 mL/min시，출현침적부산물ZrC；련속침적시，득도적ZrO2도층위산봉상형모。
Zirconia(ZrO2) coatings were deposited on C/C samples by atmospheric pressure chemical vapor deposition (APCVD) from ZrCl4-CO2-H2-Ar system with different parameters. The phase composition and surface morphologies of the ZrO2coatings were investigated by X-ray diffractometry (XRD) and scanning electronic microscopy (SEM). The experimental results show that the surface morphology of the coating changes from accumulation of small grains to polycrystals with large size as the temperature increases. Only a little ZrO2is found in part of the sample surface when prepared with no hydrogen, and the ZrO2crystals are larger and have obvious characteristic of crystallographic plane when the hydrogen flow rate is 400 mL/min; the byproduct of C and ZrC is obtained when the hydrogen flow rate is 800 mL/min, and the byproduct of ZrC are obtained when the hydrogen flow rate is 1 600 mL/min. The surface morphology of ZrO2 coatings looks like mountain-peak when deposited constantly.