CAJ | 학술논문

文中研究了谐振方法测量流体黏度的测量机理，采用MEMS工艺设计并加工了微悬臂梁结构的流体黏度传感器芯片，芯片作为振动体采用电磁激励和压阻检测的方法进行粘度测量。设计了封装结构并搭建了实验系统，在室温环境20℃和25℃2个温度点下进行了4种有机流体的黏度测量。实验结果表明，微悬臂梁结构的谐振式MEMS黏度传感器具有响应速度快、微型化程度高、易于实现在线流体测量等特点，黏度的测量精度优于8％，较好地满足了流体黏度的工程测量需求。
문중연구료해진방법측량류체점도적측량궤리，채용MEMS공예설계병가공료미현비량결구적류체점도전감기심편，심편작위진동체채용전자격려화압조검측적방법진행점도측량。설계료봉장결구병탑건료실험계통，재실온배경20℃화25℃2개온도점하진행료4충유궤류체적점도측량。실험결과표명，미현비량결구적해진식MEMS점도전감기구유향응속도쾌、미형화정도고、역우실현재선류체측량등특점，점도적측량정도우우8％，교호지만족료류체점도적공정측량수구。
The mechanism of fluid viscosity measurement was studied using resonance method in this paper.Firstly,the fluid viscosity sensor chip with micro cantilever beam structure was designed and manufactured using MEMS ( Micro Electro Mechanical Systems) technology.The chip as vibration body was excited by electromagnetic force and tested by piezoresistive effect for the measurement of fluid viscosity.Then the encapsulation structure was designed.Also,the experimental system was set up to calibrate the sensor through testing 4 kinds of organic fluid viscosity under 20℃and 25℃at room environment.The experimental results show that the resonant MEMS viscosity sensor with micro cantilever beam structure has characteristics of quick response,high mini-aturization,and in-situ measurement.The measuring accuracy of the sensor is better than 8%,and it can meet the measurement de-mand of fluid viscosity in the engineering.