仪表技术与传感器
儀錶技術與傳感器
의표기술여전감기
INSTRUMENT TECHNIQUE AND SENSOR
2015年
5期
4-7
,共4页
麦迪纳%阿曼古丽?图尔贡%阿布力孜?伊米提
麥迪納%阿曼古麗?圖爾貢%阿佈力孜?伊米提
맥적납%아만고려?도이공%아포력자?이미제
光波导气敏元件%NiO-ZnFe2 O4 复合薄膜%二甲苯%挥发性有机气体%溶胶凝胶法
光波導氣敏元件%NiO-ZnFe2 O4 複閤薄膜%二甲苯%揮髮性有機氣體%溶膠凝膠法
광파도기민원건%NiO-ZnFe2 O4 복합박막%이갑분%휘발성유궤기체%용효응효법
optical waveguide gas sensor%NiO-ZnFe2 O4 composite film%xylene%volatile organic compounds%sol-gel method
用溶胶凝胶法制成了NiO掺杂的ZnFe2 O4溶胶并用浸渍提拉法将其固定在锡参杂玻璃光波导表面，研制了NiO －ZnFe2 O4复合薄膜／锡掺杂玻璃光波导气敏元件，并对挥发性有机气体进行了检测。实验结果表明，该传感元件对二甲苯气体具有较好的响应，并能够检测到体积比浓度为1．0×10－7 mg／m3的二甲苯气体。该元件具有灵敏度高，响应－恢复快、重复性好、在室温下便于操作等特点。
用溶膠凝膠法製成瞭NiO摻雜的ZnFe2 O4溶膠併用浸漬提拉法將其固定在錫參雜玻璃光波導錶麵，研製瞭NiO －ZnFe2 O4複閤薄膜／錫摻雜玻璃光波導氣敏元件，併對揮髮性有機氣體進行瞭檢測。實驗結果錶明，該傳感元件對二甲苯氣體具有較好的響應，併能夠檢測到體積比濃度為1．0×10－7 mg／m3的二甲苯氣體。該元件具有靈敏度高，響應－恢複快、重複性好、在室溫下便于操作等特點。
용용효응효법제성료NiO참잡적ZnFe2 O4용효병용침지제랍법장기고정재석삼잡파리광파도표면，연제료NiO －ZnFe2 O4복합박막／석참잡파리광파도기민원건，병대휘발성유궤기체진행료검측。실험결과표명，해전감원건대이갑분기체구유교호적향응，병능구검측도체적비농도위1．0×10－7 mg／m3적이갑분기체。해원건구유령민도고，향응－회복쾌、중복성호、재실온하편우조작등특점。
The NiO doped ZnFe2 O4 sol was synthesized by solg-el method and the sensor was fabricated by coating a tin -doped glass optical waveguide with a NiO-ZnFe2 O4 composite film.The optical waveguide sensor was fixed on the gas sensor system to de-tect VOCs gases.The experimental results showed that the sensor has strong response to the xylene gas compared to other organic gases which have same concentration.The minimum concentration of detection to xylene was 1.0×10-7mg /m3 .The sensor also has many advantages such as high sensitivity,fast response and recovery speed,good repeatability and can be operated at room tempera-ture.
