CAJ | 학술논문

研制了一种基于白光波长扫描干涉法的表面形貌抗振反馈测量系统，介绍了白光扫描干涉法的相位提取算法和相位去包裹算法，对声光可调滤光器低速率扫频时产生的非线性误差进行了算法修正，设计了用于振动补偿的DSP硬件控制模块，并搭建了抗振反馈测量系统。在不同振动环境下，对研磨12级的标准样块进行了三维表面形貌测量以及粗糙度参数评定。结果表明，施加低频振源后的粗糙度评定参数大小为未施加任何振源的粗糙度评定参数大小的2倍左右，开启系统振动反馈后，粗糙度评定参数接近最大允许值，说明本测量方法能在一定程度上消除振动噪声的影响，保证测量的顺利进行。二维、三维表面评定结果对比表明，三维表面评定能更全面地表现被测表面的形貌特征。
연제료일충기우백광파장소묘간섭법적표면형모항진반궤측량계통，개소료백광소묘간섭법적상위제취산법화상위거포과산법，대성광가조려광기저속솔소빈시산생적비선성오차진행료산법수정，설계료용우진동보상적DSP경건공제모괴，병탑건료항진반궤측량계통。재불동진동배경하，대연마12급적표준양괴진행료삼유표면형모측량이급조조도삼수평정。결과표명，시가저빈진원후적조조도평정삼수대소위미시가임하진원적조조도평정삼수대소적2배좌우，개계계통진동반궤후，조조도평정삼수접근최대윤허치，설명본측량방법능재일정정도상소제진동조성적영향，보증측량적순리진행。이유、삼유표면평정결과대비표명，삼유표면평정능경전면지표현피측표면적형모특정。
A surface topography measurement system with vibration compensation was developed herein based on the white-light wavelength scanning interferometry .Both of phase extraction algo-rithm and phase unwrapping algorithm was analyzed for the white-light wavelength scanning interfer-ometry .They could be used to modify the nonlinear errors during the acousto-optic tunable filter (AOTF) swept at low rate .The hardware control module was designed for the vibration compensa-tion .In order to verify the designed system ,both of 3-dimensional(3D) surface topography and the roughness parameter of the standard sample grinding at level 12 were evaluated under different vibra-tion environments .The results demonstrate that the measurement results with low frequency vibra-tion are about two times than those of without vibration .After opening the system vibration feedback , the results approache to the maximum allowed value .It shows that the proposed method can eliminate the vibration effect in a certain extent .Compared with two dimensional(2D) surface evaluation re-sults ,3D surface evaluation can express the measured topography surface comprehensively .