真空
真空
진공
VACUUM
2015年
3期
59-62
,共4页
窦志军%刘文正%陈修阳
竇誌軍%劉文正%陳脩暘
두지군%류문정%진수양
真空%等离子体%电极结构%磁场%生成特性
真空%等離子體%電極結構%磁場%生成特性
진공%등리자체%전겁결구%자장%생성특성
vacuum%plasma%electrode structure%magnetic field%generation characteristic
本文针对锥-筒、锥-螺旋电极结构,通过Ansoft Maxwell 3D电磁场仿真软件,分析了放电时,两种电极内部的电场分布与磁场分布。通过朗缪尔探针法,对真空放电生成的等离子体参数进行了测量,重点讨论了电极内部磁场对等离子体生成密度的影响。在上述讨论的基础上,针对锥-螺旋电极,进一步分析了螺旋电极的螺距对电极间的电磁场分布及等离子体生成和传播特性的影响。实验及仿真结果表明,锥-螺旋电极较传统的锥-筒电极,可以获得较高密度的金属等离子体。放电电流在螺旋状电极内部产生的磁场,对向四周扩散的等离子体有一定的约束作用,适当减小螺旋电极的螺距,既可以增大阴极尖端的电场强度,同时可以有效增大螺旋电极内部的磁场强度,更易于在电极轴向获得更高密度的等离子体。
本文針對錐-筒、錐-螺鏇電極結構,通過Ansoft Maxwell 3D電磁場倣真軟件,分析瞭放電時,兩種電極內部的電場分佈與磁場分佈。通過朗繆爾探針法,對真空放電生成的等離子體參數進行瞭測量,重點討論瞭電極內部磁場對等離子體生成密度的影響。在上述討論的基礎上,針對錐-螺鏇電極,進一步分析瞭螺鏇電極的螺距對電極間的電磁場分佈及等離子體生成和傳播特性的影響。實驗及倣真結果錶明,錐-螺鏇電極較傳統的錐-筒電極,可以穫得較高密度的金屬等離子體。放電電流在螺鏇狀電極內部產生的磁場,對嚮四週擴散的等離子體有一定的約束作用,適噹減小螺鏇電極的螺距,既可以增大陰極尖耑的電場彊度,同時可以有效增大螺鏇電極內部的磁場彊度,更易于在電極軸嚮穫得更高密度的等離子體。
본문침대추-통、추-라선전겁결구,통과Ansoft Maxwell 3D전자장방진연건,분석료방전시,량충전겁내부적전장분포여자장분포。통과랑무이탐침법,대진공방전생성적등리자체삼수진행료측량,중점토론료전겁내부자장대등리자체생성밀도적영향。재상술토론적기출상,침대추-라선전겁,진일보분석료라선전겁적라거대전겁간적전자장분포급등리자체생성화전파특성적영향。실험급방진결과표명,추-라선전겁교전통적추-통전겁,가이획득교고밀도적금속등리자체。방전전류재라선상전겁내부산생적자장,대향사주확산적등리자체유일정적약속작용,괄당감소라선전겁적라거,기가이증대음겁첨단적전장강도,동시가이유효증대라선전겁내부적자장강도,경역우재전겁축향획득경고밀도적등리자체。
The cone-tubular electrode and the cone-spiral electrode were designed. The Ansoft Maxwell 3D simulation software simulated the electric field and magnetic field distribution for different electrodes. The vacuum-arc discharge plasmas parameters were measured by using a Langmuir probe. And we discussed the impact of magnetic field distribution on the plasma density. We furtherly analyzed the influence of the screw pitch on the magnetic field distribution between electrodes and the generation charac-teristics of vacuum-arc discharge plasmas basing on the spiral electrode. The experimental data and simulation results indicate that the cone-spiral electrode could obtain higher density metal plasmas which compared with the cone-tubular electrode. The magnetic field between electrodes which is produced by the discharge current can constrain some of the spread plasmas. Reducing the screw pitch appropriately can increase both the electric field strength at the cathode tip and the magnetic field strength be-tween electrodes. And plasmas of higher density can be obtained from the axial direction of the spiral electrode.