真空
真空
진공
VACUUM
2015年
3期
21-25
,共5页
潘成程%徐飞%谭昱全%冯驹先%干蜀毅
潘成程%徐飛%譚昱全%馮駒先%榦蜀毅
반성정%서비%담욱전%풍구선%간촉의
双螺杆泵%转子间隙%封闭容积%泄漏量%内部压力
雙螺桿泵%轉子間隙%封閉容積%洩漏量%內部壓力
쌍라간빙%전자간극%봉폐용적%설루량%내부압력
two screw vacuum pump%rotor clearance%closed volume%leakage%internal pressure
研究了双螺杆泵转子封闭容积间泄漏过程,推导出双螺杆泵在达到极限真空时平均泄漏量、内部平均压力的计算方程。计算结果表明:螺杆上不同封闭容积之间的泄漏量和压力相差很大。随着转子周边各间隙的减小,吸气端的泄漏量和压力迅速减小,排气端则相对平缓;螺杆各封闭容积间,通过圆周间隙的泄漏量与通过径向间隙、齿侧间隙泄漏量之和的差值随着转子各间隙的减小而减小。当转子间间隙小于一定值时,通过径向间隙和齿侧间隙的泄漏量会大于通过圆周间隙的泄漏量。
研究瞭雙螺桿泵轉子封閉容積間洩漏過程,推導齣雙螺桿泵在達到極限真空時平均洩漏量、內部平均壓力的計算方程。計算結果錶明:螺桿上不同封閉容積之間的洩漏量和壓力相差很大。隨著轉子週邊各間隙的減小,吸氣耑的洩漏量和壓力迅速減小,排氣耑則相對平緩;螺桿各封閉容積間,通過圓週間隙的洩漏量與通過徑嚮間隙、齒側間隙洩漏量之和的差值隨著轉子各間隙的減小而減小。噹轉子間間隙小于一定值時,通過徑嚮間隙和齒側間隙的洩漏量會大于通過圓週間隙的洩漏量。
연구료쌍라간빙전자봉폐용적간설루과정,추도출쌍라간빙재체도겁한진공시평균설루량、내부평균압력적계산방정。계산결과표명:라간상불동봉폐용적지간적설루량화압력상차흔대。수착전자주변각간극적감소,흡기단적설루량화압력신속감소,배기단칙상대평완;라간각봉폐용적간,통과원주간극적설루량여통과경향간극、치측간극설루량지화적차치수착전자각간극적감소이감소。당전자간간극소우일정치시,통과경향간극화치측간극적설루량회대우통과원주간극적설루량。
To study the leakage performance about the sealing volumes of rotors, we deduced the calculation equations of the av-erage leakage and pressure in two screw vacuum pump at its ultimate vacuum The results show that leakage and pressure in each vessel vary widely. With the decrease of rotor clearance, the leakage and pressure reduce quickly in the inlet and gently in the outlet. The difference of the leakage, which is caused by the circumferential clearance and the sum of the radial and tooth flank clearance, is also falling with the decrease of each rotor clearance. When rotor clearance is less than a certain value, the leakage caused by radial and tooth flank clearance may be greater than that caused by circumferential clearance.