真空
真空
진공
VACUUM
2015年
3期
18-20
,共3页
张帅拓%丁龙先%张钧%张盼盼
張帥拓%丁龍先%張鈞%張盼盼
장수탁%정룡선%장균%장반반
划痕实验%TiN/TiCrN/TiCrAlN%复合薄膜%膜基结合力%表面形貌
劃痕實驗%TiN/TiCrN/TiCrAlN%複閤薄膜%膜基結閤力%錶麵形貌
화흔실험%TiN/TiCrN/TiCrAlN%복합박막%막기결합력%표면형모
scratch test%TiN/TiCrN/TiCrAlN%multi-film%adhesion strength%surface morphology
使用划痕仪对多弧离子镀制备的 TiN/TiCrN/TiCrAlN 复合薄膜进行了划痕实验,结合金相显微镜观察分析划痕表面形貌,综合判定了该复合薄膜的膜基结合力。结果表明,该薄膜的失效形式为周边剥落;单一的声信号曲线不能准确判定薄膜失效的临界载荷,需要声信号曲线与划痕形貌的综合判定。
使用劃痕儀對多弧離子鍍製備的 TiN/TiCrN/TiCrAlN 複閤薄膜進行瞭劃痕實驗,結閤金相顯微鏡觀察分析劃痕錶麵形貌,綜閤判定瞭該複閤薄膜的膜基結閤力。結果錶明,該薄膜的失效形式為週邊剝落;單一的聲信號麯線不能準確判定薄膜失效的臨界載荷,需要聲信號麯線與劃痕形貌的綜閤判定。
사용화흔의대다호리자도제비적 TiN/TiCrN/TiCrAlN 복합박막진행료화흔실험,결합금상현미경관찰분석화흔표면형모,종합판정료해복합박막적막기결합력。결과표명,해박막적실효형식위주변박락;단일적성신호곡선불능준학판정박막실효적림계재하,수요성신호곡선여화흔형모적종합판정。
The scratching text was carried out on the TiN/TiCrN/TiCrAlN multi-film, which was deposited by multi-arc ion plat-ing (MAIP).The surface morphology of the scratch line was observed by metalloscope. The adhesion strength was evaluated by the acoustic signal and the optical images. The results show that the failure mode of the film is Rim Peel, and single acoustic signal can't exclusively judge the adhesion strength. The critical load and the interfacial adhesion strength can only be synthetic evaluat-ed by the acoustic signal and the scratch line morphology.