光电工程
光電工程
광전공정
OPTO-ELECTRONIC ENGINEERING
2015年
5期
88-94
,共7页
柔性支撑%透镜支撑%热变形%自重变形%有限元分析
柔性支撐%透鏡支撐%熱變形%自重變形%有限元分析
유성지탱%투경지탱%열변형%자중변형%유한원분석
flexible support%lens support structure%thermal deformation%gravity deformation%finite element analysis
透镜面形精度是影响透射式光学系统性能的主要因素之一，支撑结构、自重和热载荷是引起透镜面形发生变化的三个主要原因。为了实现大口径透镜(Φ>200 mm)的高面形精度，本文设计了一种新的基于多点柔性支撑的透镜支撑结构，通过有限元分析，给出该柔性支撑结构下自重和热载荷对透镜面形的影响。分析结果表明：重力作用下透镜上、下表面面形RMS值分别为6.78 nm和3.46 nm；热载荷作用下透镜上、下表面面形RMS值分别为8.30 nm和5.57 nm。由此得出，本文设计的多点柔性支撑结构可以有效减少自重和热载荷对大口径镜面面形的影响，满足透射式光学系统对透镜面形的精度要求(RMS<λ/50，λ=632.8 nm)。
透鏡麵形精度是影響透射式光學繫統性能的主要因素之一，支撐結構、自重和熱載荷是引起透鏡麵形髮生變化的三箇主要原因。為瞭實現大口徑透鏡(Φ>200 mm)的高麵形精度，本文設計瞭一種新的基于多點柔性支撐的透鏡支撐結構，通過有限元分析，給齣該柔性支撐結構下自重和熱載荷對透鏡麵形的影響。分析結果錶明：重力作用下透鏡上、下錶麵麵形RMS值分彆為6.78 nm和3.46 nm；熱載荷作用下透鏡上、下錶麵麵形RMS值分彆為8.30 nm和5.57 nm。由此得齣，本文設計的多點柔性支撐結構可以有效減少自重和熱載荷對大口徑鏡麵麵形的影響，滿足透射式光學繫統對透鏡麵形的精度要求(RMS<λ/50，λ=632.8 nm)。
투경면형정도시영향투사식광학계통성능적주요인소지일，지탱결구、자중화열재하시인기투경면형발생변화적삼개주요원인。위료실현대구경투경(Φ>200 mm)적고면형정도，본문설계료일충신적기우다점유성지탱적투경지탱결구，통과유한원분석，급출해유성지탱결구하자중화열재하대투경면형적영향。분석결과표명：중력작용하투경상、하표면면형RMS치분별위6.78 nm화3.46 nm；열재하작용하투경상、하표면면형RMS치분별위8.30 nm화5.57 nm。유차득출，본문설계적다점유성지탱결구가이유효감소자중화열재하대대구경경면면형적영향，만족투사식광학계통대투경면형적정도요구(RMS<λ/50，λ=632.8 nm)。
The surface-profile precision of lens is a main factor which influences the performance of the optical system. There are three main reasons which influence the lens surface-profile most, and they are the supporting structure, gravity and thermal load. In order to achieve the goal of getting high surface-profile precision of the lens (Φ>200 mm), a new multi-points flexible supporting structure is designed. Then, the influence of gravity and thermal load with the designed structure is analyzed. The results are as follows: for the deformation caused by gravity, the surface root-mean-square (RMS) value is 6.78 nm and 3.46 nm for the upper and lower surface respectively;for the deformation caused by thermal load, the surface (RMS) value is 8.30 nm and 5.57 nm for the upper and lower surface respectively. The designed structure with multi-point flexible support can effectively reduce the influence of precision loss which is caused by gravity and thermal load, and meet the requirements of high surface-profile precision of large-aperture lens for transmission-type optical system(RMS<λ/50,λ=632.8 nm).
