CAJ | 학술논문

为了直观、准确地定量分析表面拉曼增强散射基底结构的拉曼增强，利用磁控溅射和高温退火的方法制备了银纳米粒子修饰垂直排列的碳纳米管阵列三维复合结构样品；实验采用罗丹明6G （R6G ）溶剂作为探针分子，结合共聚焦显微拉曼系统，开展了表面增强拉曼增强因子（EF）分析计算的相关实验。SEM 结果表明：在有序碳纳米管阵列的表面和外壁均匀地负载了大量银纳米粒子。对退火温度为450℃，退火时间为30 min的样品进行了EF计算，得到其增强因子约为2.2×103，并分析了EF值低的原因主要是：在碳纳米管上溅射的银膜膜厚不均匀，导致退火后银颗粒分布不均，使得样品粗糙度值偏大，EF值较低；实验中所用的激励光源并非银纳米颗粒的优化光源。
위료직관、준학지정량분석표면랍만증강산사기저결구적랍만증강，이용자공천사화고온퇴화적방법제비료은납미입자수식수직배렬적탄납미관진렬삼유복합결구양품；실험채용라단명6G （R6G ）용제작위탐침분자，결합공취초현미랍만계통，개전료표면증강랍만증강인자（EF）분석계산적상관실험。SEM 결과표명：재유서탄납미관진렬적표면화외벽균균지부재료대량은납미입자。대퇴화온도위450℃，퇴화시간위30 min적양품진행료EF계산，득도기증강인자약위2.2×103，병분석료EF치저적원인주요시：재탄납미관상천사적은막막후불균균，도치퇴화후은과립분포불균，사득양품조조도치편대，EF치교저；실험중소용적격려광원병비은납미과립적우화광원。
To intuitive and accurate quantitatively analyze Raman enhancement of surface enhanced Raman scattering substrate structure ,three‐dimensional composite structure of silver nanoparticles modified vertically aligned carbon nanotube array is pro‐duced by magnetron sputtering and thermal annealing process ;Relevant experiments using Rhodamine 6G (R6G) solution as the molecular probes are conducted to analyze surface enhanced Raman enhancement factor (EF) ,combining with confocal Raman microscopy systems .The result of scanning electron microscopy (SEM) shows that a large number of silver nanoparticles are at‐tached onto the tips and sidewalls of the ordered carbon nanotubes array uniformly .EF of the sample which was produced 30 min annealing time and 450 ℃ annealing temperature evaluates to 2.2 × 103 ,and the reasons for the low EF are analyzed :on the one hand ,thickness of silver film sputtered on vertically aligned carbon nanotube array is non‐uniform ,leading to distribution of sil‐ver nanoparticles is uneven after annealing ,so that the value of sample roughness is too large ,EF value is low ;on the other hand ,the excitation light source is not the advantage wavelength of silver nanoparticles in the experiments .