CAJ | 학술논문

在微波等离子体化学气相沉积（MPCVD）装置中，氢气作为镀膜工艺中重要的参与气体，对镀膜工艺有直接的影响。在微波放电等离子体发生装置中激发氢等离子体，使用高分辨率的多道光谱分析仪实时采集 Hα谱线，对谱线的线型分布进行微分，得出谱线的能量分布，进一步分析氢原子在等离子体中经历的分子过程。结果显示，氢原子的能量分布有3个明显的能量峰，分别在0.3 eV处、2.5 eV处和3 eV处。其中，0.3 eV处的峰比较强，表明在微波放电等离子体条件下，氢原子发生的分子过程主要是离解激发。
재미파등리자체화학기상침적（MPCVD）장치중，경기작위도막공예중중요적삼여기체，대도막공예유직접적영향。재미파방전등리자체발생장치중격발경등리자체，사용고분변솔적다도광보분석의실시채집 Hα보선，대보선적선형분포진행미분，득출보선적능량분포，진일보분석경원자재등리자체중경력적분자과정。결과현시，경원자적능량분포유3개명현적능량봉，분별재0.3 eV처、2.5 eV처화3 eV처。기중，0.3 eV처적봉비교강，표명재미파방전등리자체조건하，경원자발생적분자과정주요시리해격발。
In the microwave plasma chemical vapor deposition(MPCVD)devices, hydrogen as an important participation in the coating process gas has a direct impact on the coating process. Multi-channel spectrum analyzer excited hydrogen plasma in microwave discharge plasma generator, a high-resolution real-time acquisition Hα line, the distribution of the linear spectrum is differentiated spectral energy distribution obtained, further analysis of hydrogen atoms in the plasma undergo molecular processes. The results showed that the energy distribution of the hydrogen atoms of three distinct energy peaks at 0.3 eV, respectively, 2.5 eV and 3 eV at the place. Among them, the peak at 0.3 eV relatively strong, suggesting that under microwave discharge plasma conditions, the hydrogen atoms in the molecular processes primarily stimulate dissociation.