机械工程师
機械工程師
궤계공정사
MECHANICAL ENGINEER
2015年
6期
159-161,162
,共4页
唐翠荣%左勇%徐晓波%刘军%束小梅
唐翠榮%左勇%徐曉波%劉軍%束小梅
당취영%좌용%서효파%류군%속소매
精密孔径测量仪%长光栅%光电瞄准%非接触%绝对测量
精密孔徑測量儀%長光柵%光電瞄準%非接觸%絕對測量
정밀공경측량의%장광책%광전묘준%비접촉%절대측량
precision aperture measuring instrument%long grating%photoelectrical aligning%non-contact%absolute-length measuring
精密孔径测量仪是一台以长光栅为标准,利用光电瞄准技术进行非接触绝对测量的高精度测长仪器;主要用于测量内孔直径,还可以用于测量轴径、两平行平面距离及玻璃尺刻线间距等。文中主要研究测量范围为(0~200) mm,分辨力为0.1μm的精密孔径测量仪的检定方法。
精密孔徑測量儀是一檯以長光柵為標準,利用光電瞄準技術進行非接觸絕對測量的高精度測長儀器;主要用于測量內孔直徑,還可以用于測量軸徑、兩平行平麵距離及玻璃呎刻線間距等。文中主要研究測量範圍為(0~200) mm,分辨力為0.1μm的精密孔徑測量儀的檢定方法。
정밀공경측량의시일태이장광책위표준,이용광전묘준기술진행비접촉절대측량적고정도측장의기;주요용우측량내공직경,환가이용우측량축경、량평행평면거리급파리척각선간거등。문중주요연구측량범위위(0~200) mm,분변력위0.1μm적정밀공경측량의적검정방법。
Owing to taking optical long grating as a standard and using photoelectrical aligning , the precision aperture measuring instrument (PAMI) is a high precision non-contact absolute-length measuring instrument. This verification method is suitable for the verification of the precision aperture measuring instrumen (PAMI) with (0~200) mm of measuring range and 0.1μm of resolution. The method prescribes the metrological characteristics , verification items , verification methods, verification procedure and processing of verifying results for PAMI.