计量学报
計量學報
계량학보
ACTA METROLOGICA SINICA
2015年
3期
295-298
,共4页
王萌阳%陈智军%蒋玲%刘敬勇%童锐
王萌暘%陳智軍%蔣玲%劉敬勇%童銳
왕맹양%진지군%장령%류경용%동예
计量学%乐甫波%粘度%液体传感%层状结构
計量學%樂甫波%粘度%液體傳感%層狀結構
계량학%악보파%점도%액체전감%층상결구
Metrology%Love wave%Viscosity%Liquid sensing%Laminated medium
利用部分波理论和边界条件精确推导，对“粘性液体／非压电薄膜／压电基底”3层乐甫波结构建模，分析得出随叉指周期变小，液体粘度灵敏度提高，传播衰减增大；随“薄膜厚度与波长之比”增大，液体的粘度灵敏度随之先减小再增大，液体密度灵敏度几乎为零。优化设计了以36°钽酸锂和 SiO2为基底和薄膜的乐甫波器件，制作并测试实物，实验结果与数值仿真基本一致，表明了理论模型的正确性。
利用部分波理論和邊界條件精確推導，對“粘性液體／非壓電薄膜／壓電基底”3層樂甫波結構建模，分析得齣隨扠指週期變小，液體粘度靈敏度提高，傳播衰減增大；隨“薄膜厚度與波長之比”增大，液體的粘度靈敏度隨之先減小再增大，液體密度靈敏度幾乎為零。優化設計瞭以36°鐽痠鋰和 SiO2為基底和薄膜的樂甫波器件，製作併測試實物，實驗結果與數值倣真基本一緻，錶明瞭理論模型的正確性。
이용부분파이론화변계조건정학추도，대“점성액체／비압전박막／압전기저”3층악보파결구건모，분석득출수차지주기변소，액체점도령민도제고，전파쇠감증대；수“박막후도여파장지비”증대，액체적점도령민도수지선감소재증대，액체밀도령민도궤호위령。우화설계료이36°단산리화 SiO2위기저화박막적악보파기건，제작병측시실물，실험결과여수치방진기본일치，표명료이론모형적정학성。
The theory model of Love wave loaded with viscous liquid is established,the influences of liquid viscosity on propagation velocity of Love wave are analyzed. The thickness of the film is optimized and the Love wave device is fabricated on 36°LiTaO3 with a SiO2 film overlaid. The device is fabricated and tested,The experimental results are basically in accordance with simulation analysis,proving the validity of theory model.
