CAJ | 학술논문

使用严格耦合波分析和有限元模拟方法,设计了一种新颖的亚波长非周期高对比折射率光栅( HCG).该HCG的结构参数在1．55μm波长能同时满足在Si材料上制作聚焦反射镜和在GaN材料上制作聚焦透镜,且具有符合微电子工艺的平面结构.模拟结果显示,2种HCG都具有大的数值孔径、很高的衍射系数和优秀的聚焦能力.由于具有相同的HCG结构参数,聚焦透镜和反射镜可以在制作工艺上使用同一光刻掩模版,这对需要聚焦功能的器件,尤其是Si和III族氮化物集成器件的设计制作,提供了极大的方便.
사용엄격우합파분석화유한원모의방법,설계료일충신영적아파장비주기고대비절사솔광책( HCG).해HCG적결구삼수재1．55μm파장능동시만족재Si재료상제작취초반사경화재GaN재료상제작취초투경,차구유부합미전자공예적평면결구.모의결과현시,2충HCG도구유대적수치공경、흔고적연사계수화우수적취초능력.유우구유상동적HCG결구삼수,취초투경화반사경가이재제작공예상사용동일광각엄모판,저대수요취초공능적기건,우기시Si화III족담화물집성기건적설계제작,제공료겁대적방편.
A novel subwavelength non-periodic high index contrast grating ( HCG) structure is designed by rigorous coupled-wave analysis (RCWA) method and finite-element method (FEM). At 1. 55 μm wavelength, the HCG can serve as focusing reflector;when the grating bars material is Si, or as focusing lens when the grating bars mate-rial is GaN. Both reflectors and lenses have large numerical aperture ( NA) , high diffraction efficiencies and excel-lent focusing ability. The reflector and the lens can be simply fabricated using lithography with same mask because of the identical structure, which greatly facilitates fabricating photonic devices that require focusing components, especially for the Si and III-nitride integrated photonic devices.