CAJ | 학술논문

采用传统的常压固相烧结方法制备了Li3PO4陶瓷靶材，研究了烧结温度对Li3PO4陶瓷靶材的微观结构力学性能、致密度的影响。通过XRD测定靶材相的结构，SEM观察靶材的断面形貌，万能实验机测量靶材的抗弯强度，维氏显微硬度仪测量靶材的维氏硬度，阿基米德排水法测量靶材密度等对Li3PO4靶材的性能进行了分析表征。结果表明：其各项力学性能均达到了一个很高的水平，靶材的最佳烧结温度为800℃，抗弯强度为76.16 Mpa，维氏硬度为475.87HV0.3，相对密度为98.89%；而XRD数据则表明靶材物相单一且结晶性良好。
채용전통적상압고상소결방법제비료Li3PO4도자파재，연구료소결온도대Li3PO4도자파재적미관결구역학성능、치밀도적영향。통과XRD측정파재상적결구，SEM관찰파재적단면형모，만능실험궤측량파재적항만강도，유씨현미경도의측량파재적유씨경도，아기미덕배수법측량파재밀도등대Li3PO4파재적성능진행료분석표정。결과표명：기각항역학성능균체도료일개흔고적수평，파재적최가소결온도위800℃，항만강도위76.16 Mpa，유씨경도위475.87HV0.3，상대밀도위98.89%；이XRD수거칙표명파재물상단일차결정성량호。
Li3PO4 ceramic targets were prepared by traditional solid-state sintering method. The effects of the sintering temperature on the microstructure, the mechanical properties and the density were discussed. The phase structure of the as-prepared targets was analyzed by X-ray diffractometer. The fracture morphology was observed by SEM. The bending strength was measured by the universal testing machine and the Vickers hardness was measured by the Vickers microhardness instrument. The density was measured using the Archimedes drainage method. The results show that the optimal sintering temperature is 800℃, resulting in a bending strength of 76.16 MPa, a Vickers hardness of 475.87HV0.3 and a relative density of 98.89%, which are excellent for a ceramic target material. XRD results indicated the sintered target having a good crystallinity.