CAJ | 학술논문

采用磁控溅射方法，制备了惣不同厚度Ru薄膜为籽晶层的CoCrPt-SiO2垂直磁记录薄膜。利用原子力显微镜(AFM)、透射电镜(TEM)分析 Ru 薄膜的结构和形貌，并悁究了其结构对CoCrPt-SiO2薄膜表面形貌、粗糙度及结构的愝响。结果表明，CoCrPt-SiO2记录层的晶粒尺寸和粗糙度均随着 Ru 籽晶层厚度的增加而增加，薄而粗糙的籽晶层适合于高密度磁记录介质。对于CoCrPt-SiO2记录层晶粒的优化，厚度为70 nm的Ru籽晶层有利于记录层薄膜晶粒的完全隔离，从而提高了磁记录性能。
채용자공천사방법，제비료총불동후도Ru박막위자정층적CoCrPt-SiO2수직자기록박막。이용원자력현미경(AFM)、투사전경(TEM)분석 Ru 박막적결구화형모，병연구료기결구대CoCrPt-SiO2박막표면형모、조조도급결구적언향。결과표명，CoCrPt-SiO2기록층적정립척촌화조조도균수착 Ru 자정층후도적증가이증가，박이조조적자정층괄합우고밀도자기록개질。대우CoCrPt-SiO2기록층정립적우화，후도위70 nm적Ru자정층유리우기록층박막정립적완전격리，종이제고료자기록성능。
CoCrPt-SiO2 perpendicular recording films were prepared by the magnetron sputtering with a series of Ru films as the seed layer. The microstructure of Ru seed layers and their effects on the grain size, roughness and surface morphology of CoCrPt-SiO2 granular films were also investigated. It was found that the microstructure of seed layer obviously affected the structure and grain isolation of recording layers. The grain size and roughness of CoCrPt-SiO2 recording layer increased with the increase of the thickness of Ru seed layer. The thin and rough Ru seed layer could be used for the high-density magnetic recording media, but the Ru seed layer with a proper thickness of 70 nm facilitated a perfect isolation, and consequently excellent magnetic properties could be acquired for the final products.