CAJ | 학술논문

超精密加工就是在超精密机床设备上，利用零件与刀具之间产生的具有严格约束的相对运动，对材料进行微量切削，以获得极高形状精度和表面光洁度的加工过程。当前的超精密加工是指被加工零件的尺寸精度高于0．1μm，表面粗糙度小于0．025μm，以及所用机床定位精度的分辨率和重复性高于0．01μm的加工技术，亦称之为亚微米级加工技术。
초정밀가공취시재초정밀궤상설비상，이용령건여도구지간산생적구유엄격약속적상대운동，대재료진행미량절삭，이획득겁고형상정도화표면광길도적가공과정。당전적초정밀가공시지피가공령건적척촌정도고우0．1μm，표면조조도소우0．025μm，이급소용궤상정위정도적분변솔화중복성고우0．01μm적가공기술，역칭지위아미미급가공기술。
Ultra precision machining is a machining process which makes use of the relative motion of strict con-straints generated between parts and cutters to carry out micro-cutting on the materials to achieve high precision in shape and high smoothness in surface on ultra-precision machine tools . Ultra-precision machining current is a machining tech-nology that the precision of size of the processed parts is higher than 0.1 microns, the surface roughness is less than 0.025 microns, and the resolution of t positioning accuracy of the machine tools and repeatability is higher than 0.01 mu m's ,it is, also called sub-micron machining technology.