CAJ | 학술논문

为了获得双桥臂硅微悬臂梁的谐振频率随其质量块尺寸的变化规律，首先推导出了双桥臂硅微悬臂梁谐振频率的解析式，并对9组不同尺寸的双桥臂单晶硅微悬梁的谐振频率随附加质量块长度的变化规律进行了分析。结果表明，随着附加质量块长度的增加，悬臂梁的固有频率会逐渐地减小，并且随着质量块长度所占微悬臂梁总长度比例的增大，附加质量所引起的微悬臂梁谐振频率的变化量在总谐振频率中所占的比重呈逐步减小的趋势。
위료획득쌍교비규미현비량적해진빈솔수기질량괴척촌적변화규률，수선추도출료쌍교비규미현비량해진빈솔적해석식，병대9조불동척촌적쌍교비단정규미현량적해진빈솔수부가질량괴장도적변화규률진행료분석。결과표명，수착부가질량괴장도적증가，현비량적고유빈솔회축점지감소，병차수착질량괴장도소점미현비량총장도비례적증대，부가질량소인기적미현비량해진빈솔적변화량재총해진빈솔중소점적비중정축보감소적추세。
In order to obtain the relationship between the changes of resonance frequency of microcantilever with double beams and the dimensions of added mass, the formula of resonance frequency of microcantilever with double beams was deduced.In addition, using the samples of nine kinds of microcantilevers with double beams, the relationship between the lengths of added mass and the resonance frequencies was analyzed.The results show that the resonance frequency of microcantilever decreases with the increasing length of added mass.Moreover, when the ratio of the length of added mass versus the total length of microcantilever increases, the ratio of the in-duced resonance frequency by added mass versus the resonance frequency of microcantilever decreases.