CAJ | 학술논문

压阻型传感器存在温度漂移误差和输出信号非线性等问题，当使用压阻传感器构建精密传感系统时，压阻型传感器的非线性特性影响系统的测量精度。通常情况下，为解决传统传感器的精度，往往采取板级补偿的方法，补偿算法开发复杂，造成传感系统体积大、功耗较大。文中通过研究电阻型传感器的非线性产生原理和补偿方法，设计并实现了一种工作范围达到-65~125℃的高精度传感器信号调理的单芯片，在此基础上实现了信号调理的校准软件的补偿算法及校准使用软件。基于上述研究，构建了以信号调理芯片为核心的单片传感器信号调理补偿系统，并对单芯片补偿后的传感器系统进行了实际测试。测试结果表明在-55~125℃的温度范围内输出的信号与压力呈良好的线性关系，误差小于6‰，满足系统的测量精度需求；高集成度的单芯片设计也满足工程小型化、低功耗、高精度的要求，为信号调理补偿提供了新的技术手段。
압조형전감기존재온도표이오차화수출신호비선성등문제，당사용압조전감기구건정밀전감계통시，압조형전감기적비선성특성영향계통적측량정도。통상정황하，위해결전통전감기적정도，왕왕채취판급보상적방법，보상산법개발복잡，조성전감계통체적대、공모교대。문중통과연구전조형전감기적비선성산생원리화보상방법，설계병실현료일충공작범위체도-65~125℃적고정도전감기신호조리적단심편，재차기출상실현료신호조리적교준연건적보상산법급교준사용연건。기우상술연구，구건료이신호조리심편위핵심적단편전감기신호조리보상계통，병대단심편보상후적전감기계통진행료실제측시。측시결과표명재-55~125℃적온도범위내수출적신호여압력정량호적선성관계，오차소우6‰，만족계통적측량정도수구；고집성도적단심편설계야만족공정소형화、저공모、고정도적요구，위신호조리보상제공료신적기술수단。
The intrinsic error of non-linearity output and temperature drift for pressure sensor has a strong impact to the entire system ac-curacy when using pressure sensor to build precision sensor system. Under normal circumstances,in order to solve the precision of the tra-ditional sensor,often take the board compensation method,the compensation algorithm is complex for development,causing large volume and big power consumption for sensor system. Through the study of nonlinear principle and compensation method of resistance type sen-sor,design and realize a single chip disposed by high precision sensor with work scope of-65~125 ℃,on this basis,realize the calibra-tion software compensation algorithm of signal disposal and software of calibration. Based on the above research,the single sensor signal conditioning compensation system with signal conditioning chip as the core is constructed,and the sensor system of single chip compensa-tion is tested. The measurement shows that a good linearity performance of output versus the measured pleasure is observed at temperature range from -55~125 ℃,the total error is less than 6‰,meeting the requirements of measurement precision. High integration of the sin-gle chip design also meets the requirements of miniaturization, low power consumption, high precision, and provides a new technical means for signal disposal compensation.