CAJ | 학술논문

设计了一种锥型结构的多自由度超声电机，电机定子采用单足驱动方式，利用四分区的叠层式压电陶瓷作为激励元件，在两路相位差90°的正弦信号激励下，驱动足分别产生沿X Z 平面、Y Z 平面的椭圆运动轨迹，进而驱动电机动子作直线运动。针对多自由度超声电机定子结构及实现2个自由度运动输出的要求，自行设计两自由度平台解决方案。
설계료일충추형결구적다자유도초성전궤，전궤정자채용단족구동방식，이용사분구적첩층식압전도자작위격려원건，재량로상위차90°적정현신호격려하，구동족분별산생연X Z 평면、Y Z 평면적타원운동궤적，진이구동전궤동자작직선운동。침대다자유도초성전궤정자결구급실현2개자유도운동수출적요구，자행설계량자유도평태해결방안。
An MDOF USM having a cone shaped structure was designed.A one foot drive mode was used.A piezoelectric stack having four quadrants was employed as the exciting element, which was driven by two sinusoidal signals with a phase difference of 90 degrees.The elliptical mo-tion of the driving foot along the X Z or Y Z plane was able to make the motor move linearly. Based on the performance of stator structure of MDOF USM and the requirements of achieving two DOF motion output,a two DOF platform so-lution was independently designed.