CAJ | 학술논문

为了解决射频板条CO2激光器因安装或腔镜热畸变造成的光路偏移问题，采用外光路偏移补偿的方法对其进行校正。研究了基于压电陶瓷的偏移补偿装置，设计了压电陶瓷驱动电路，并分析了控制精度和自适应控制方法。结果表明，通过偏移补偿装置，激光输出功率在任何占空比下均可达到或超过标准参考功率值，并通过对比有无自适应调节，激光输出功率最大相差100W，且可保持激光输出功率在2h运行中波动小于2％。此项研究可保证激光器高效运行，提高激光器的输出功率和模式的稳定性，具有较大的实用价值。
위료해결사빈판조CO2격광기인안장혹강경열기변조성적광로편이문제，채용외광로편이보상적방법대기진행교정。연구료기우압전도자적편이보상장치，설계료압전도자구동전로，병분석료공제정도화자괄응공제방법。결과표명，통과편이보상장치，격광수출공솔재임하점공비하균가체도혹초과표준삼고공솔치，병통과대비유무자괄응조절，격광수출공솔최대상차100W，차가보지격광수출공솔재2h운행중파동소우2％。차항연구가보증격광기고효운행，제고격광기적수출공솔화모식적은정성，구유교대적실용개치。
In order to solve the problem of the output beam offsets induced by assembling and heat distortion of mirrors in radio frequency slab CO 2 lasers, offsets were compensated by means of the outside optics .An offset compensation device was designed based on piezoelectric ceramics .Piezoelectric ceramics actuators were designed and the control accuracy and adaptive control method were analyzed .The results show that laser output power at any duty ratio can meet or exceed the standard reference power value after compensation .The maximum difference of output power is 100W before and after adaptive regulation and the laser output power fluctuation is less than 2%during the running of 2h.The output beam compensation can ensure laser run efficiently , increase the stability of laser power and laser mode .The research has the high practical value .