CAJ | 학술논문

X-Y向柔性调节机构应用于光刻投影物镜中光学元件X-Y方向偏心位置补偿。基于柔性铰链，设计柔性二级减速机构，并将之应用到新型的一体式X-Y向柔性调节机构上。在对机构原理进行分析的基础上，对X-Y向柔性调节机构结构参数进行了优化设计。进一步，运用有限元分析法，分析了该X-Y向柔性调节机构的性能。分析结果表明，该机构调节行程大于±20μm，机构位移输入?输出关系稳定，传动比约11.9，理论调节精度约8.4 nm，机构单方向驱动刚度为0.473μm/N；机构开环单轴运动时，耦合误差与主运动比值为7.1%；机构1阶模态频率大于200 Hz。该X-Y向柔性调节机构能够应用到光刻投影物镜中。
X-Y향유성조절궤구응용우광각투영물경중광학원건X-Y방향편심위치보상。기우유성교련，설계유성이급감속궤구，병장지응용도신형적일체식X-Y향유성조절궤구상。재대궤구원리진행분석적기출상，대X-Y향유성조절궤구결구삼수진행료우화설계。진일보，운용유한원분석법，분석료해X-Y향유성조절궤구적성능。분석결과표명，해궤구조절행정대우±20μm，궤구위이수입?수출관계은정，전동비약11.9，이론조절정도약8.4 nm，궤구단방향구동강도위0.473μm/N；궤구개배단축운동시，우합오차여주운동비치위7.1%；궤구1계모태빈솔대우200 Hz。해X-Y향유성조절궤구능구응용도광각투영물경중。
The flexure-basedX-Y adjusting mechanism is applied in lithograph projection objectives to compensate the eccentric position of the optical elements inX-Y direction. Based on flexible hinges, two-stage flexible deceleration mechanism is designed. Further, making use of the two-stage flexible deceleration mechanism, a flexure-basedX-Y adjusting mechanism which is new and of one part is created. Based on the analysis of the principle of the mechanism, structural parameters of the flexure-basedX-Y adjusting mechanism are optimized. Moreover, using finite element method, performance of the flexure-basedX-Y adjusting mechanism is studied. The results showed that the adjusting stroke is greater than ±20μm, the displacement input-output relationship of the mechanism is steady, the transmission ratio is 11.9, the theoretically regulation accuracy is about 8.4 nm, the single-direction drive stiffness is 0.473μm/N, and the ratio of coupling error and the main movement is 7.1%, when the mechanism moves open-loop and single-axis, and the first modal frequency is greater than 200 Hz. The flexure-basedX-Y adjusting mechanism can be used in lithograph projection objective.