CAJ | 학술논문

提出了一种利用薄膜反射光谱包络线法计算光电薄膜光学常数和厚度的方法。当一束光照射在基板上的介质膜上时，由于薄膜上、下界面反射光的相干，会使反射光谱的曲线有一定的波动。本文对反射光谱进行了理论分析，给出计算公式，从测量曲线中的实验值得出薄膜的厚度和光学常数。此种方法计算过程简单、迅速，而且易于编程处理。
제출료일충이용박막반사광보포락선법계산광전박막광학상수화후도적방법。당일속광조사재기판상적개질막상시，유우박막상、하계면반사광적상간，회사반사광보적곡선유일정적파동。본문대반사광보진행료이론분석，급출계산공식，종측량곡선중적실험치득출박막적후도화광학상수。차충방법계산과정간단、신속，이차역우편정처리。
A method to calculate thickness and optical constants of photoelectric film is introduced. When a light beam is incident on the film,the reflection light beams at the front and rear faces are coherent. In this pa-per,we calculated the thickness and optical constants of the film from the reflection spectrum. This simple method saves time,and makes a directly programmable calculation possible.