CAJ | 학술논문

介绍了一种提高硅电容压力传感器过载回零响应速度的方法，通过在传感器硅可动极板上设计、制作快速导油微结构，实现了传感器过载回零响应速度的大幅度提升，解决了传感器设计中一项关键技术难题，使硅电容压力传感器真正达到了实用化程度，满足了工业现场的实际使用要求。
개소료일충제고규전용압력전감기과재회령향응속도적방법，통과재전감기규가동겁판상설계、제작쾌속도유미결구，실현료전감기과재회령향응속도적대폭도제승，해결료전감기설계중일항관건기술난제，사규전용압력전감기진정체도료실용화정도，만족료공업현장적실제사용요구。
Silicon capacitive pressure sensor is a new type of structure force sensor. Compared with conventional silicon tech-nology,silicon capacitive sensor has significant advantages in measurement accuracy,stability and reliability.A silicon capacitive sensor overload zeroing method to improve the response speed was presented in this paper.The designing of an oil lead tank struc-ture in the silicon capacitive sensor movable guide plates enhanced the overload back zero response speed of the sensor greatly.This technique solves the key technical problem in the capacitive sensor design,so that the capacitive sensor achieves the practical de-gree and meets the actual requirements of industrial application.