CAJ | 학술논문

介绍了一种单刀双掷面内电热微驱动器。基于U型梁受热膨胀的原理,在电压作用下梁受热变形,推动接触电极和信号电极接触,进而输出信号。分别采用金属镍和氮化硅作为驱动器主体结构和隔离部分的结构材料。利用Coven-torware软件对驱动器中U型折叠梁进行有限元仿真,得出折叠梁在温度为300 K、电压为3 V、热臂宽度为2μm时,冷臂宽度和驱动位移、驱动力之间的曲线关系图,进而确定冷臂的宽度为20μm。此时梁的位移为22μm,固定端受力为180 N。最后进行应力校核,梁的最大应力为120 MPa,小于镍的许用应力,具有较高的可靠性。
개소료일충단도쌍척면내전열미구동기。기우U형량수열팽창적원리,재전압작용하량수열변형,추동접촉전겁화신호전겁접촉,진이수출신호。분별채용금속얼화담화규작위구동기주체결구화격리부분적결구재료。이용Coven-torware연건대구동기중U형절첩량진행유한원방진,득출절첩량재온도위300 K、전압위3 V、열비관도위2μm시,랭비관도화구동위이、구동력지간적곡선관계도,진이학정랭비적관도위20μm。차시량적위이위22μm,고정단수력위180 N。최후진행응력교핵,량적최대응력위120 MPa,소우얼적허용응력,구유교고적가고성。
This paper presented a kind of single pole double throw(SPDT) micro electro thermal actuator,which was in-planed.It worked based on the U type beam heated expansion principle,making the beam thermal deformation under the effect of voltage and promoting the contact electrode contacted with the signal electrode,then output the signal.The actuator used nickel as the main structure material,and silicon nitride as the isolating material.Finite element simulation of the U type folded beam of the actuator was done using the Coventorware software.The relationship between the cold arm width and the driving force and the dis-placement curve diagrams was got when the temperature was 300 K,voltage was 3 V and the hot arm width was 2μm,then that the cold arm width was 20μm was determined.In that condition,the beam displacement was 22μm and the fixed end force was 180 N. Finally,through checking the stress,the result shows that the maximum beam stress is 120 MPa,which is smaller than the allowable stress of nickel,showing that the U type folded beam has high reliability.